Magnetic levitation guide rail and its air gap thickness control method

A guide rail and maglev technology, applied in the direction of bearings, shafts and bearings, mechanical equipment, etc., can solve the problem of inability to guarantee, and achieve the effect of increasing the use stroke and improving the magnetic levitation air gap.

Active Publication Date: 2019-04-30
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for large-travel guide rails, due to the limitation of machining accuracy and materials, the air film thickness of tens of microns cannot be guaranteed, so it is required to use low-deformation materials (such as ceramics) or increase the air film thickness to achieve it, resulting in many inconvenient

Method used

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  • Magnetic levitation guide rail and its air gap thickness control method
  • Magnetic levitation guide rail and its air gap thickness control method
  • Magnetic levitation guide rail and its air gap thickness control method

Examples

Experimental program
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Effect test

Embodiment 1

[0031] like image 3 as shown, image 3 Yes figure 2 The cross-sectional side view of the magnetic levitation guide shown in this embodiment, in this embodiment, it can not only provide a stable large-size magnetic levitation working air gap to meet the needs of a frictionless guide rail with a larger stroke, but also can be adjusted arbitrarily like an air flotation system The base air gap thickness even turns off the magnetic levitation function.

[0032] In this structure, the stator 20 has a plurality of sliding grooves, and the mover 10 floats and slides in the sliding grooves, and the sliding grooves are formed by steel guide rails 1-103, 1-103a, 1-103b. Therefore, it can be understood that when the mover 10 floats on the surface of the stator 20 , the mover 10 has a plurality of tooth-shaped structures protruding into the sliding slots to match the surface shape of the stator 20 . In this embodiment, the mover 10 is the slider frame 1-104. The stator 20 also includ...

Embodiment 2

[0042] like Figure 8 As shown, in this embodiment, 3-101 is an oblique magnetized magnet installed on both sides of the V-shaped groove-shaped guide rail, and its function is similar to that of magnetized magnets 1-101 and 1-102a in Embodiment 1, 1-102b; 3-105 is the rotatable magnet embedded in the slide block, its effect is similar to the rotatable magnet 1-105a, 1-105b in embodiment one; 3-106a, 3-106b is the horizontal stiffness magnet, its effect Similar to the horizontal stiffness magnets 1-106a, 1-106b in Example 1; 3-109a, 3-109b are RX-direction stiffness magnets, which make the RX direction have stiffness, so that the slider cannot be arbitrarily deflected or moved along the X-direction. Can only deflect in a small range.

[0043] In this embodiment, the magnetized magnetic steel is magnetized obliquely compared with the first embodiment, and the horizontal stiffness magnet is located at the bottom of the sliding groove. It can be seen that the present invention d...

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Abstract

The invention provides a magnetic levitation guide rail. A rotor and a stator are separately provided with a magnet and magnetizing magnet steel to form opposite magnetic circuits. Buoyancy and rigidity in multiple directions are formed between the rotor and the stator, so that a rotor of a connected load and the stator of the guide rail form a magnetic levitation gap. Besides, the invention further provides an air gap thickness control method of the magnetic levitation guide rail, the magnetic circuit structure is changed by changing the space angle of magnetic steel in the rotor, the purpose of changing the buoyancy is realized, and thus the linear magnetic levitation guide rail has wider application prospects than other passive magnetic levitation guide rails. The magnetic levitation guide rail can provide a stable basic buoyancy gap without the need of an air source; for different weights, the buoyancy can be changed within a wider range by adjusting an internal magnetic circuit structure, and the purpose of calibrating the gap is realized; and because the magnetic levitation air gap can be obviously improved compared with a gas floatation air gap, the magnetic levitation guide rail is not subjected to limit of face type processing any longer, and theoretically the use stroke can be increased infinitely.

Description

technical field [0001] The invention relates to the field of precision motion, in particular to a magnetic levitation guide rail and an air gap thickness control method thereof. Background technique [0002] Air-bearing guide rails have been widely used in the fields of precision machining and photolithography. The principle is to inject compressed air between the shaft and the sliding sleeve of the guide rail, so that there is tension in the air film in the gap to support the movement of the moving parts. [0003] However, in the field of semiconductors, with the demand for large-scale lithography processing such as TFT, the contradiction between the total length of the guide rail and the requirements for the flatness of the guide rail by air bearing has become more and more prominent, and the air bearing guide rail cannot guarantee the overall plane The case of the degree is satisfied by infinitely lengthening the dimension. The air-floating guide rail needs to pass throu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16C32/04
CPCF16C32/0434
Inventor 季汉川杨晓峰陈庆生
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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