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Position detection device, position detection method, information processing program, and recording medium

A detection device and detection point technology, applied in image data processing, special data processing applications, semiconductor/solid-state device testing/measurement, etc. The effect of robustness

Active Publication Date: 2020-11-06
ORMON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the prior art has a problem in that when the number of calculation values ​​(hypotheses) is increased while securing the number of detection points sufficiently, the time required for verification processing becomes longer, and on the contrary, when reducing the number of detection points When the number of verification objects (evaluation objects), that is, the number of calculated values ​​is reduced by the number of points, the estimation accuracy will decrease
[0007] In addition, in the above-mentioned prior art, there is also a problem that, when an abnormality detection point exists, the deviation of the estimation result based on a plurality of hypotheses (a plurality of calculated center positions) increases, and the processing may stop.
In addition, in order to reduce the probability of processing stoppage, a certain degree of deviation (estimated value of poor precision) has to be allowed to be mixed, and the conventional method of using the average of all hypotheses has a problem that the accuracy of the final output decreases.

Method used

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  • Position detection device, position detection method, information processing program, and recording medium
  • Position detection device, position detection method, information processing program, and recording medium
  • Position detection device, position detection method, information processing program, and recording medium

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no. 1 approach 〕

[0063] Below, based on Figure 1 to Figure 6 The first embodiment of the present invention will be described in detail. In the description of the first embodiment, an example in which the image processing device 10 estimates parameters related to the position of the planar figure I50 is particularly described. However, the image processing device 10 is not limited to estimating the "position-related parameters" of the planar figure I50, and the image processing device 10 may estimate "edge-related parameters" including the planar figure I50 as described in the second embodiment described later. etc. define the general parameters of the plane graph I50.

[0064] In addition, graphics that can be processed by the image processing device 10 are not limited to planar graphics (two-dimensional graphics), and the image processing device 10 may estimate parameters defining three-dimensional graphics (three-dimensional graphics). That is, the image processing device 10 can estimate ...

no. 2 approach 〕

[0174] The following is based on Figure 7 and Figure 7 A second embodiment of the present invention will be described in detail. So far, the example in which the image processing device 10 estimates the plane figure of the position parameter is the plane figure I50 which is a substantially circular figure, and the estimated position parameter is the center position has been described. However, the image processing device 10 estimates a plane figure of the position parameter is not limited to a substantially circular figure, and the estimated position parameter is not limited to the center position. In the following embodiments, a method for estimating the periphery (the conic curve) of the planar figure I60 including the conic curve in the periphery (the edge) by the image processing device 10 will be described.

[0175] Here, regarding the outer circumference of the plane figure I60, without considering the rotation, the following simple quadratic curve equation can be us...

no. 3 approach 〕

[0205] The control blocks of the image processing device 10 (in particular, the image acquisition unit 11, the hypothesis calculation unit 12, the hypothesis verification unit 13, the user operation acquisition unit 14, the tentative value setting unit 15, and the hypothesis extraction unit 16) can be formed in an integrated circuit (IC chip) and other logic circuit (hardware) implementation, and can also be implemented by software using a CPU (Central Processing Unit).

[0206] In the latter case, the image processing device 10 includes a CPU that executes software that realizes each function, that is, a command of a program, and a ROM (Read Only Memory) in which the above-mentioned program and various data are recorded so as to be readable by a computer (or CPU). Or a recording device (these are referred to as "recording medium"), a RAM (Random Access Memory) in which the above program is developed, and the like. Furthermore, the object of the present invention is achieved b...

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Abstract

The present invention relates to a position detection device, a position detection method, an information processing program, and a recording medium, which improve robustness including abnormal detection values ​​and achieve both high estimation accuracy and estimation processing speed in a hypothesis verification type position detection device. of high speed. The image processing device (10) evaluates only the calculated value close to the temporary center (PP1) among the calculated values ​​(points H1 and H2) of the central position of the planar figure (I50) as based on a plurality of detected points (D51˜Dn) ( validation) object.

Description

technical field [0001] The present invention relates to a position detection device or the like of a semiconductor wafer or the like, which is an object of processing or the like. Background technique [0002] In manufacturing sites such as the manufacture of semiconductor wafers, the positioning of objects such as processing and inspection is a basic technology. As a technology for obtaining parameters related to the position of the object, such as the figure center, etc., it is known that high accuracy can be expected. Putative hypothesis-testing type fitting technique. [0003] For example, in the following Patent Document 1, as a hypothesis-checking type fitting technique, in the case of calculating the wafer center position from the wafer outer periphery, it is possible to avoid erroneous calculation of the wafer center position due to misidentification of the wafer outer periphery position. technology, disclosed: [0004] Detect the position coordinates of more than ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F30/33H01L21/66
CPCH01L22/12G06F30/392H01L21/681H01L21/682G06T7/0004G06T2207/10004G06T2207/30148H01L21/67259G06T7/73
Inventor 凑善久服部宏祐木内豊赤塚祐己
Owner ORMON CORP
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