MEMS resonant-column type spherical oscillator vector hydrophone based on piezoresistive effect

Abstract

The present invention discloses a MEMS resonant-column type spherical oscillator vector hydrophone based on a piezoresistive effect. The hydrophone comprises a frame pedestal, four edges of the frame pedestal are connected with an annular connector through beams, the annular connector is provided with a spherical vibration pick-up unit which has density of 1g / cm3; the outer sides of the four beams are respectively provided with a voltage dependent resistor R11, a voltage dependent resistor R12, a voltage dependent resistor R13 and a voltage dependent resistor R14, the frame pedestal is provided with a reference resistor R2, a reference resistor R3 and a reference resistor R4; and the voltage dependent resistor R11, the voltage dependent resistor R12, the voltage dependent resistor R13 and the voltage dependent resistor R14 are connected in series and are connected with the reference resistor R2, the reference resistor R3 and the reference resistor R4 through metal wires to form a Wheatstone electric bridge structure. Starting from theory, the MEMS resonant-column type spherical oscillator vector hydrophone based on the piezoresistive effect designs and optimizes a resonant-column type spherical oscillator vector hydrophone with microminiaturization, good low frequency characteristic, high sensitivity, wide working band, common mode output and differential mode inhibition.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to a MEMS co-vibration spherical vibrator vector hydrophone based on the piezoresistive effect. Background technique [0002] At present, the vector hydrophones developed at home and abroad are generally divided into two categories: co-vibration type and differential pressure type. For the differential pressure vector hydrophone, because the depth of the "8" cosine directivity pit is too shallow, the pointing accuracy is not high, which limits its application in the field of underwater acoustics. For the co-vibration vector hydrophone, according to the different sound wave receiving theories of the particle velocity hydrophone, the co-vibration vector hydrophone can be divided into the co-vibration cylindrical oscillator vector hydrophone and the co-vibration spherical oscillator vector hydrophone device. Conventional co-vibration vector hydrophones must be fixed...

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Problems solved by technology

[0003] The present invention solves the problem of poor anti-flow noise performance, low sensitivity, poor anti-shock performance, high quality, mismatch between acoustic impedance and water, and low-frequency characteristics of the spherical vibrator vector underwater acoustic sensor brought about by existing technical solutions such as conventional design and processing technology. Inferior problems, a MEMS co-vibration spherical vibrator vector hydrophone based on the piezoresistive effect is provided

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