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Capacitive type MEMS resonator with multi-pairs of driving induction electrodes

A sensing electrode and capacitive technology, applied in the field of electronic science, can solve problems such as poor load capacity and small output current, and achieve the effects of improving drive capacity, increasing output current, and increasing maximum vibration amplitude

Active Publication Date: 2017-07-28
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a capacitive MEMS resonator with multiple pairs of driving induction electrodes for the background technology of capacitive resonators with small output current and poor load capacity, by doping the vibrating block and electrodes , constructing four pairs of driving sensing electrodes, under the same small signal excitation, the output current of the resonator is increased, thereby improving the driving ability of the resonator

Method used

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  • Capacitive type MEMS resonator with multi-pairs of driving induction electrodes
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  • Capacitive type MEMS resonator with multi-pairs of driving induction electrodes

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Embodiment 1

[0032] This embodiment provides a capacitive MEMS resonator with multiple pairs of driving sensing electrodes, such as figure 1 , image 3 , Figure 4As shown, it includes: vibration block, vibration block support beam, vibration block anchor point, input and output electrodes, electrode support beam and electrode anchor point; the vibration block is square and is divided into a square semiconductor area 1-5 and 4 A trapezoidal semiconductor region 1-1, 1-2, 1-3, 1-4, wherein the trapezoidal semiconductor region 1-1, 1-3 adopts N-type doping, and the trapezoidal semiconductor region 1-2, 1-4 adopts P-type Doping, the square semiconductor region 1-5 adopts any type of doping, and the trapezoidal semiconductor region 1-1, 1-2, 1-3, 1-4 supports beams 3-1, 3-2, 3-3, 3-4 are connected to the vibration block anchor points 5-1, 5-2, 5-3, 5-4, the vibration block support beam and the corresponding trapezoidal semiconductor region are doped with the same type; the input and output ...

Embodiment 2

[0039] This embodiment provides a capacitive MEMS resonator with multiple pairs of driving sensing electrodes, such as figure 2 As shown, the vibration block is square and divided into four semiconductor regions 1-1, 1-2, 1-3, 1-4 along the diagonal direction, wherein the semiconductor regions 1-1, 1-3 are N-type doped The impurity and semiconductor regions 1-2 and 1-4 are doped with P type, and other structures are the same as those in Embodiment 1.

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Abstract

The invention belongs to the technical field of electronic sciences, and specifically provides a capacitive type MEMS resonator with multi-pairs of driving induction electrodes. A problem that the existing capacitive type resonator is small in output current and bad in carrying load capacity is overcome. The MEMS resonator comprises one vibration block, four vibration block support beams, four vibration block anchor points, four input-output electrodes, four electrode support beams and four electrode anchor points; four pairs of driving induction electrodes are constructed by use of a method for performing partitioned doping on the vibration block and doping the input-output electrodes, so that the electrostatic force of the resonator in working is greatly increased, the output current and the maximum vibration amplitude of the resonator are greatly increased, and the driving capacity of the resonator is improved.

Description

technical field [0001] The invention belongs to the field of electronic science and technology, and relates to RF MEMS devices, especially capacitive MEMS resonators, and specifically provides a capacitive MEMS resonator with multiple pairs of driving induction electrodes. Background technique [0002] Resonators are one of the key devices in electronic equipment. At present, quartz crystal resonators are mainly used in electronic equipment. However, with the further requirements for high performance and miniaturization of electronic equipment, the large volume and high power of quartz crystal resonators Disadvantages such as power consumption and incompatibility with IC processes have become very prominent. The electrostatically driven capacitive MEMS resonator is a high-performance resonator device based on micromechanical technology and micromechanical vibration. Has good prospects. [0003] At present, the most researched MEMS resonators are mainly electrostatically dr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/24H03H9/02H03H3/02
CPCH03H3/02H03H9/02259H03H9/2405H03H2003/027
Inventor 鲍景富秦风李昕熠鲍飞鸿张翼张亭
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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