A medium and high energy electron gun

Abstract

The invention discloses a medium-high energy electronic gun which comprises an electronic gun body, a differential exhaust tube, an electrode flange and a high-voltage Q9 head arrangement plate, wherein the electrode flange is fixedly arranged on the differential exhaust tube; the high-voltage Q9 head arrangement plate is fixedly arranged at the rear end of the electrode flange; the differential exhaust tube is also provided with a flange base, a differential exhaust interface and a vacuum gauge interface separately; the electronic gun body is fixedly arranged at the inner side of a flange base interface; and the electronic gun body comprises a hot cathode filament, a pressure wafer, a gate base, an anode, a focusing electrode, a deflection mechanism, a molybdenum sheet, a first insulating spacer, a second insulating spacer, a third insulating spacer, a gun head and an outer barrel. A secondary focusing lens formed by the gate base, the anode and the focusing electrode is adopted by the electronic gun, so that the focusing performance and the parallel performance are good; and the deflection mechanism is arranged in the gun head, so that a beam spot position is adjustable. The electronic gun is simple in structure and stable in performance.

Description

technical field [0001] The invention relates to the field of electronic optical devices, in particular to a medium-high energy electron gun for an electron energy loss spectrometer. Background technique [0002] In the field of atomic and molecular physics, the experimental method of electron scattering is often used to obtain the internal structure information of atomic molecules by measuring the dynamic parameters of atomic molecules. In this process, the experimental equipment often used is: electron energy loss spectrometer, electron momentum spectrometer, Auger electron spectrometer. The key technology of these equipment lies in the precise control and detection of electron beam current. For example, in the electron energy loss spectrometer, the electron beam emitted from the electron gun is monochromated by the energy monochromator, collides with the sample gas, and then is collected and analyzed by the energy analyzer. In order to obtain an electron beam with high be...

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Problems solved by technology

On the other hand, there is no deflection mechanism inside the commonly used electron gun, and the electron gun needs to be mechanically matched with the experimental device, which cannot be flexibly adjusted at multiple angles, and it is more troublesome to debug.

In addition, some medium-energy electron guns use a magnetic field to deflect the electron beam. Because the shielding of the magnetic field is very difficult, the deflection magnetic field will interfere with the trajectory of the electron beam in the analyzer, seriously affecting the energy resolution of the electron spectrometer.

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