MEMS galvanometer for inhibiting laser speckles and manufacturing method of MEMS galvanometer

Abstract

The invention provides an MEMS galvanometer for inhibiting laser speckles in a laser display system and a manufacturing method of the MEMS galvanometer. An SOI (Silicon-On-Insulator) is used as a processing object of the MEMS galvanometer; the MEMS galvanometer is manufactured by micro-processing technologies such as photoetching, etching and coating and mainly comprises a reflective mirror, a resonance suspension girder, driving comb teeth, detecting comb teeth and the like. Tiny waving features which are distributed randomly are designed on the surface of the reflective mirror, and a function of inhibiting the speckles is fulfilled by interfering laser phase while laser reflection is realized. The driving comb teeth, the detecting comb teeth and the resonance beam structure which are matched with the reflective mirror are designed on the reflective mirror, by electrostatic drive of the comb teeth, in-plane vibration of the reflective mirror can be realized, the contrast ratio of the speckles is reduced due to time average by stacking of speckle images in human visual retention time, and the speckle inhibiting effect of the device is improved. The laser speckle inhibiting device in an MEMS galvanometer mode has the characteristics of high reliability, low energy consumption, obvious speckle inhibiting effect, simplicity in processing, easiness in large-scale production and the like.

Description

[0001] 【Technical field】 [0002] The invention relates to the field of laser projection display, in particular to a MEMS vibrating mirror for suppressing laser speckle and a manufacturing method thereof. [0003] 【Background technique】 [0004] Compared with traditional display technology, laser projection display technology has a wider color gamut and is easy to obtain vivid and vivid pictures. It has ultra-high brightness and contrast and is easy to improve the quality of display pictures. It is a very competitive display technology with the characteristics of high performance, energy saving and environmental protection. One of the main barriers to the current application of laser displays is the phenomenon of laser speckle. The laser light source has high coherence, and the diffuse reflection light produced by the laser light source after the rough screen is irradiated will have serious interference on the spatial optical path to form obvious interference fringes. Since t...

AI Technical Summary

Problems solved by technology

The above-mentioned devices or devices can reduce the speckle contrast and have their own advantages, but there are also disadvantages in various aspects, such as complex manufacturing process, poor process controllability, high cost, serious loss of light energy, complex structure, and difficult to achieve miniaturization. and integration etc.

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