Clamped-beam direct-heating type microwave signal detecting instrument
A technology of microwave signal and detection instrument, which is applied in the direction of instrument, electric power measurement by thermal method, measurement device, etc., can solve problems such as large size, and achieve the effects of high sensitivity, low power consumption and low cost
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[0026] The sensor part of the fixed beam direct heating microwave signal detection instrument of the present invention consists of a six-port fixed beam coupler 1, a channel selection switch 2, a microwave frequency detector 3, a microwave phase detector 4, and a first direct heating microwave power sensor. 5-1 cascaded structure; the six-port fixed beam coupler 1 is composed of a coplanar waveguide 10, a dielectric layer 12, an air layer 15 and a fixed beam 13 across it; the coplanar waveguide 10 is made of SiO 2 On the layer 9, the anchor region 11 of the fixed beam 13 is made on the coplanar waveguide 10, and the dielectric layer 12 is deposited under the fixed beam 13, and forms a coupling capacitor structure together with the air layer 15 and the fixed beam 13, two The length of the coplanar waveguide 10 between the fixed support beams 13 is λ / 4; the channel selection switch 2 is composed of the coplanar waveguide 10, the anchor region 11, the dielectric layer 12, the cant...
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