Single-crystal thermal field gradient additional adjustment system

Abstract

The invention discloses a single-crystal thermal field gradient additional adjustment system which is arranged on an upper cover plate of a single crystal furnace and is arranged in a manner of surrounding an inner flow guide barrel, and consists of a plurality of annular components including a first component, a second component, a third component, a fourth component and a fifth component; the first component, the second component and the third component are set to be temperature adjustment parts in sequence from top to bottom; the temperature adjustment parts form an included angle of 160 to 180 degrees relative to the inner flow guide barrel; a heat insulation part is arranged on the outer side of each temperature adjustment part; the heat insulation parts are formed by stacking fourth components and fifth components in the horizontal direction from inside to outside; the adjustment of the adaptability to the gradient of a thermal field at the upper part of the single-crystal thermal field guarantees smooth transition of the gradient of the thermal field and enables a required temperature region of a crystal rod to be in a proper temperature gradient so as to control the crystal rod to be at a cooling speed of the certain temperature region; meanwhile, the single-crystal thermal field gradient additional adjustment system can rectify gas.

Description

technical field [0001] The invention relates to the technical field of photovoltaic silicon single crystal growth, in particular to a single crystal thermal field gradient additional adjustment system. Background technique [0002] As the photovoltaic industry changes, the quality of silicon single crystal growth becomes more and more important. In order to adapt to the market, the industry has made one or all of the changes in the material above the liquid level of the Czochralski single crystal thermal field, such as water-cooled heat shields, water-cooled jackets, retaining rings, and inner guide tubes; but it is unavoidable that in the Above the draft tube (including the water-cooled heat shield), there is a region with a sharp change in the thermal field gradient, and the thermal history of the crystal between 700-1100°C cannot be in an ideal state to ensure the quality of the single crystal; at 400-700°C In between, the thermal field cooling system cannot be effective...

AI Technical Summary

Problems solved by technology

In order to adapt to the market, the industry has made one or all of the changes in the material above the liquid level of the Czochralski single crystal thermal field, such as water-cooled heat shields, water-cooled jackets, retaining rings, and inner guide tubes; but it is unavoidable that in the Above the draft tube (including the water-cooled heat shield), there is a region with a sharp change in the thermal field gradient, and the thermal history of the crystal between 700-1100°C cannot be in an ideal state to ensure the quality of the single crystal; at 400-700°C In between, the thermal field cooling system cannot be effectively used, resulting in a large amount of oxygen donors that could have been avoided, affecting production

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