Graphene-distributed multi-physical-quantity sensor array system

Abstract

The invention discloses a graphene-distributed multi-physical-quantity sensor array system. The graphene-distributed multi-physical-quantity sensor array system comprises an array circuit board and array circuits, wherein the array circuits are distributed on the array circuit board; a plurality of graphene-distributed multi-physical-quantity sensor sub-modules connected with the array circuits are arranged on the array circuit board; each graphene-distributed multi-physical-quantity sensor sub-module comprises four physical quantity sensors including a graphene strain sensor, a graphene pressure sensor, a graphene temperature sensor and a graphene humidity sensor.

Description

technical field [0001] The invention relates to a sensor array system, in particular to a graphene distributed multi-physical quantity sensor array system. Background technique [0002] Smart sensing technologies are positively changing the way people perceive, think and behave. Wearable devices, electronic skin and other sensor devices that can perceive external pressure, temperature, airflow and tactile signals like human skin. In particular, in the fields of human health monitoring, health management of large equipment, human-computer interaction and military fields, cumbersome wearable weapons and energy supply systems seriously limit the combat flexibility of soldiers, and the integrated technology of soft and multi-physical quantity sensing has become a Urgent needs. [0003] Strain, temperature, humidity, and pressure are important physical quantities in various monitoring systems, and these physical quantities are usually measured using separate sensors. The disad...

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Problems solved by technology

[0005] Although the sensor chips disclosed in the above three patents can simultaneously measure multiple physical quantities such as temperature, humidity, and pressure, the preparation process is relatively complicated, and different films are used to make elements for measuring temperature, humidity, and pressure.

These sensors are all metal thin film resistive sensors. Due to the limitations of thin film technology, in order to reduce defects, the film is generally made thicker (>1μm), resulting in a relatively low resistance change rate ΔR / R, so compared with other types of sensors , relatively low sensitivity

Moreover, sensors based on metal thin films have insurmountable barriers in terms of flexibility and stretchability, which limit their applications.

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