Neutron beam injector ion source field reverse configuration plasma radio frequency driver

Abstract

The invention discloses a neutron beam injector ion source field reverse configuration plasma radio frequency driver, which comprises a vacuum cavity. Outside the vacuum cavity, two coils arranged in parallel are used as a radio frequency power supply antenna. Each coil consists of windings with 1.5 turns or more. The distance between the two coils is larger than the maximum gap between any windings. The two coils are connected with the same phase RF current and the magnetic fields generated by the coils share the same direction, and a metal Faraday cup is arranged at the inner side of the vacuum cavity. The present invention overcomes the shortcomings of the conventional plasma radio frequency driver of neutron beam injector ion source, which uses a uniform magnetic field confinement plasma mode. The driver of the invention utilizes an alternating non-uniform magnetic field and the driven self-magnetic field of the annular plasma current and establishes a field reversal configuration plasma confinement mode, therefore, preventing the Faraday cup from being in direct contact with the high temperature plasma and benefiting the temperature rise and the constraint of the plasma.

Description

technical field [0001] The invention relates to a plasma radio-frequency driver of an ion source of a neutral beam implanter, in particular to a plasma radio-frequency driver with a field reverse configuration capable of improving plasma confinement. Background technique [0002] At present, the structure of the plasma RF driver of the ion source of the known neutral beam implanter is: the vacuum chamber is made of cylindrical ceramics or quartz glass; The energy delivered in the body stimulates and confines the plasma; at the same time, in order to prevent the inner wall of the vacuum chamber from being bombarded and polluted by the plasma, a metal cylinder called a Faraday cylinder is installed inside the vacuum chamber. The equidistant solenoid generates a magnetic field that alternates in time and is uniform in space (hereinafter referred to as: uniform magnetic field) in the vacuum chamber, which excites the ionization of the medium in the vacuum chamber to generate pla...

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Problems solved by technology

The confinement method of this uniform magnetic field makes the Faraday cage directly contact the high-temperature plasma, which is not conducive to the temperature rise and confinement of the plasma.

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