Epitaxial wafer for flip infrared light-emitting diode
An infrared light-emitting and diode technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of difficult to obtain interface quality quantum wells and quantum barrier layers, and the brightness of light-emitting diodes cannot be effectively improved, so as to achieve the effect of improving quantum efficiency.
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[0019] 1. Preparation method:
[0020] Such as figure 1 As shown, each layer is epitaxially grown on the n-GaAs substrate from bottom to top by metal organic chemical vapor deposition (MOCVD) method.
[0021] On n-GaAs substrate 1, epitaxially grow n-GaAs buffer layer 2 from bottom to top, n-GaInP etch stop layer 3, n-GaAs contact layer 4, n-Al x Ga 1-x As current spreading layer 5, n-Al x Ga 1-x As lower confinement layer 6, Al x Ga 1-x As lower waveguide layer 7, active layer 8, Al x Ga 1-x As on the waveguide layer 9, p-Al x Ga 1-x Confinement layer 10 on As, p-Al x Ga 1-x As current spreading layer 11, p-GaAs cladding layer 12.
[0022] Wherein: n-GaAs substrate 1 is an N-type GaAs material of (100) plane.
[0023] The n-GaInP etch stop layer 3 has a thickness of 200nm and adopts Si 2 h 6 as a source of doping.
[0024] n-Al x Ga 1-x The thickness of the As current spreading layer 5 is between 1000nm and 10000nm, and 02 h 6 as a source of doping.
[002...
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