Passive type MEMS flow-induced vibration strengthened heat transfer apparatus and heat transfer method
An enhanced heat transfer and passive technology, applied in microstructure devices, microstructure devices composed of deformable elements, piezoelectric devices/electrostrictive devices, etc. Heat dissipation performance, complex overall structure and other issues, to achieve the effect of simple structure, avoiding material separation, and good heat dissipation effect
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[0015] The present invention will be further described below in conjunction with the drawings and embodiments.
[0016] Such as figure 1 As shown, a passive temperature-controlled MEMS flow-induced vibration-enhanced heat transfer device includes a heat sink base 1, a filling material 2, a comb-shaped structure 3, and a vibration part 4; the heat sink base 1 and the heating of electronic devices Part of it is connected by a heat pipe, which can absorb the heat emitted by the electronic device and increase its temperature; the driving part is composed of a comb-like structure 3 and a filling material 2 filled between the teeth (usually a thermal expansion coefficient greater than 1x10 -5 / K The comb-tooth structure 3 is connected to the heat sink base 1; the vibrating part 4 is an extension of the top thin layer of the comb-tooth structure 3, which forms the MEMS flow together with the comb-tooth structure 3 and the filling material 2. The cantilever beam structure 5 of the vibrat...
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