A Ship Monitoring Magnetic Field Sensor
A magnetic field sensor and naval ship technology, applied in the direction of the size/direction of the magnetic field, the use of electromagnetic devices for magnetic field measurement, instruments, etc., can solve the problems of superconducting Josephson junction process difficulties, large magnetic field gradient influence, complex system structure, etc., to achieve Excellent recognition ability, high concealment, small size effect
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[0037] The invention provides a ship monitoring magnetic field sensor, which comprises a silicon substrate 1, a metal electrode 2, an insulating layer 3, a piezoelectric film 4 and a capacitance cavity 5 filled with magnetic fluid. The specific implementation method of the present invention will be described below in conjunction with the drawings and embodiments.
[0038] A kind of naval vessel monitoring magnetic field sensor provided in this embodiment, its specific technical implementation idea: Utilize MEMS technology to design and manufacture capacitive micromachined ultrasonic transducer (cMUT) as underwater acoustic transducer, wherein injects in the capacitive cavity and is sensitive to the magnetic field The low-concentration magnetic liquid is used as the ultrasonic transmission medium. In the absence of magnetic anomaly sources, the sensor works as an underwater acoustic transducer. When the submarine approaches the coast, it will cause magnetic anomalies in the near...
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