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A chain type crystal silicon texturing equipment and preparation method

A crystalline silicon and chain-type technology, which is applied in the field of chain-type crystalline silicon texturing equipment and preparation, can solve the problem of single purpose of texturing equipment, and achieve the effect of single purpose, simple process and easy operation

Active Publication Date: 2018-02-16
深圳市石金科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] An object of the present invention is to provide a chain-type crystal silicon texturing equipment, which can meet the requirements of making polycrystalline silicon and monocrystalline silicon respectively, has good general performance, and solves the problem of single purpose of existing texturing equipment

Method used

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  • A chain type crystal silicon texturing equipment and preparation method
  • A chain type crystal silicon texturing equipment and preparation method

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Effect test

Embodiment 1

[0026] figure 1 It is a structural schematic diagram of a chain type crystal silicon texturing equipment according to an embodiment of the present invention. Such as figure 1 As shown, a chain-type crystal silicon texturing equipment of the present invention includes texturing tanks 1, cleaning tanks 2, post-processing tanks 3, drying tanks 4 and In the chain drive system 5 of transmission flower basket (not shown in the figure), described flower basket (not shown in the figure) is used for loading silicon chip, and described chain drive system comprises described texturing tank 1, cleaning tank 2 , the independent transmission device 51 that each tank body in post-processing tank 3 and drying tank 4 is all provided with, wherein the operation direction D of crystal silicon is the movement or motion direction of crystal silicon on the texturing process line, each tank There is an interval between the tanks to ensure that the solutions between adjacent tanks are separated; th...

Embodiment 2

[0044] In another specific implementation manner, the parts that are the same as those in Embodiment 1 will not be repeated here, and only the different parts will be described.

[0045] For polysilicon texturing, during the texturing process, the acidic texturing liquid is added to the texturing process tank 11, and the temperature is lowered to a predetermined temperature, and the flower basket loaded with a predetermined number of silicon wafers is transferred to the texturing liquid through a transmission device, and the crystals are reacted for a certain period of time. The silicon surface gets a textured texture of worms. The textured silicon wafers are transported to the first water tank 12 to remove the acidic solution on the surface of the crystalline silicon through the flower basket. Among them, the texturing process tank 11 also includes a texturing liquid delivery device, which has an automatic liquid replenishment function according to the batch of reaction, so t...

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Abstract

The invention provides chain crystalline silicon texturing equipment and a preparation method, and belongs to the field of crystalline silicon solar cells. The chain crystalline silicon texturing equipment comprises a texturing tank, a cleaning tank, a post-treatment tank, a drying tank and a chain drive system which are sequentially arranged along the operation direction of crystalline silicon at intervals; the chain drive system is used for driving a flower basket; the flower basket is used for loading a silicon wafer; the chain drive system comprises the texturing tank, the cleaning tank, the post-treatment tank and the drying tank; and each tank body in the texturing tank, the cleaning tank, the post-treatment tank and the drying tank is provided with individual drive devices. The chain crystalline silicon texturing equipment provided by the invention can meet the requirements of texturing polycrystalline silicon and monocrystalline silicon respectively, can also be applied to a metal catalytic etching texturing technology, and is good in general performance; and the problem of a single purpose of existing texturing equipment is solved. The preparation method of crystalline silicon texturing provided by the invention can be applicable to polycrystalline silicon and monocrystalline silicon texturing technologies.

Description

technical field [0001] The invention relates to the field of crystalline silicon solar cells, in particular to a chain-type crystalline silicon texturing equipment and a preparation method. Background technique [0002] In the manufacture of crystalline silicon solar cells, the wet texturing process is to wet-etch the surface of crystalline silicon wafers to form a textured surface structure, reduce the reflectivity of the silicon wafer surface, and allow sunlight to be emitted multiple times on the silicon wafer surface. This increases the absorption of sunlight. The commonly used texturing method is firstly to etch the surface of the monocrystalline silicon wafer with lye to form a pyramid textured structure, or to etch the surface of the polycrystalline silicon wafer with an acid solution to form a worm-like textured structure. However, the texturing of monocrystalline silicon usually requires heating the alkali solution to 75°C to 85°C and etching for at least 20 minute...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18C30B33/10
CPCC30B33/10H01L31/18Y02P70/50
Inventor 陈伟刘尧平杨丽霞吴俊桃杜小龙
Owner 深圳市石金科技股份有限公司
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