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Processing method of micro-nano tubular structure

A technology of micro-nano structure and processing method, applied in the direction of nano-structure manufacturing, specific nano-structure formation, nano-technology, etc., can solve problems such as time-consuming, inability to prepare metal materials, and inability to meet the requirements of tubular chiral structure processing, etc., to achieve expansion The effect of preparation range

Inactive Publication Date: 2016-08-10
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing three-dimensional preparation methods cannot meet the requirements for the processing of tubular chiral structures.
It is still difficult to process three-dimensional structures based on gray-scale exposure technology, and to achieve metallization or functionalization of high-aspect ratio patterns; focused electron beam / ion beam etching and assisted deposition can prepare self-supporting three-dimensional micro-nano structures, but not only It takes a lot of time and cannot prepare high-purity metal materials

Method used

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  • Processing method of micro-nano tubular structure
  • Processing method of micro-nano tubular structure
  • Processing method of micro-nano tubular structure

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Embodiment Construction

[0033] figure 1 It is a schematic flow chart of a method for processing a micro-nano tubular structure according to an embodiment of the present invention. figure 2 It is a schematic diagram of each processing step of a method for processing a micro-nano tubular structure according to an embodiment of the present invention. Such as figure 1 As shown, a processing method of a micro-nano tubular structure includes the following steps:

[0034] s101, on base 1 (see figure 2 ) Prepare transition layer 2 (see figure 2 );

[0035] s102, in the transition layer 2 (see figure 2 ) On the preparation of nano film 3 (see figure 2 );

[0036] s103, the nano film 3 (see figure 2 ) With the base 1 (see figure 2 ) Separation to obtain the separated nano film 4 (see figure 2 );

[0037] s104, the separated nano film 4 (see figure 2 ) Transferred to the support substrate 5 (see figure 2 )on;

[0038] s105, the separated nano film 4 (see figure 2 ) Process the in-plane micro-nano structure to...

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Abstract

The invention provides a processing method of a micro-nano tubular structure, and belongs to the technical field of three-dimensional micro-nano structures and devices. The processing method comprises the following steps: preparing a transition layer on a base; preparing a nano film on the transition layer; separating the nano film from the base to obtain a separated nano film; transferring the separated nano film to a support substrate; performing processing of a micro-nano structure in a plane on the nano film to obtain a micro-nano graphic structure; and performing ion beam irradiation deformation on the micro-nano graphic structure to obtain a finished product of a micro-nano tubular structure. The processing method of the micro-nano tubular structure, provided by the invention, can be used for high-controllability, high-precision, large-area and high-efficiency preparation of a material with a micro-nano tubular structure

Description

Technical field [0001] The invention relates to the technical field of three-dimensional micro-nano structures and devices, in particular to a processing method of micro-nano tubular structures. Background technique [0002] Three-dimensional chiral structures have a wide range of applications. People have prepared a variety of methods through two-photon interference exposure, laser ablation, laser interference exposure, grayscale exposure, focused electron beam / ion beam etching, deposition, and irradiation. A series of device structures such as micro-nano tweezers, three-dimensional photonic crystals, and three-dimensional metamaterial arrays have been prepared. However, the existing three-dimensional preparation methods cannot satisfy the processing of tubular chiral structures. Processing three-dimensional structures based on gray-scale exposure technology, achieving high aspect ratio pattern metalization or functional processing is still a difficult problem; focused electron...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/0009B82Y40/00
Inventor 李无瑕金凌刘哲李俊杰顾长志金爱子
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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