Resistive random access memory based on organic/inorganic hybrid perovskite material and fabrication method of resistive random access memory
A technology of resistive memory and perovskite materials, applied in the direction of electrical components, etc., to achieve high transition speed, good multi-value storage capacity, and large storage window effects
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[0042] This embodiment has Ag / CH 3 NH 3 PB 3 / Pt structure resistive memory, in which Pt is used as the bottom electrode, CH 3 NH 3 PB 3 As the storage function layer, Ag is used as the top electrode. The specific manufacturing process is as follows: (1) The Pt bottom electrode is formed by magnetron sputtering, and the specific preparation conditions are as follows: background vacuum 2×10 -4 Pa, the working pressure is 1pa, the sputtering power is 60W, the working gas is Ar gas, the deposition time is 5min, and the thickness of the formed Pt bottom electrode film is 100nm; (2) CH 3 NH 3 PB 3 storage functional layer, the specific preparation conditions are as follows: 0.395g of CH 3 NH 3 I and 1.157 g of PbI 3 The spin-coating precursor solution was prepared by dissolving 2 mL of butyrolactone, and the prepared spin-coating precursor solution was ultrasonically stirred at 70 °C for 12 hours. The spin-coating precursor solution was spin-coated on the prepared substr...
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