A method and device for improving the ability of diamond-like carbon film to resist laser damage

Abstract

The invention relates to a method and device capable of improving laser damage resistance capacity of a diamond-like thin film. The method and device aim at effectively improving the laser damage resistance capacity of a DLC thin film and a dielectric thin film on the basis of not affecting any optical constants and physical properties of the DLC thin film and the dielectric thin film. According to the technical scheme, through the method capable of improving the laser damage resistance capacity of the diamond-like thin film, magnetic continuity with a closed loop is formed on the surface of the DLC thin film and the dielectric thin film, and the magnetic flux of the closed loop has the maximum gradient. The device comprises a magnetic conductive outer frame. A pair of permanent magnets including a first permanent magnet and a second permanent magnet are arranged in the outer frame, and the distance between the first permanent magnet and the second permanent magnet is adjustable. Through the method, the damage threshold value of the DLC thin film is improved to 1.23 J / cm<2> from 0.57 J / cm<2>. For the dielectric thin film, the laser damage area is reduced by about 50%.

Description

Technical field: [0001] The invention relates to the technical field of laser damage resistance of optical thin films, in particular to a method and a device for improving the laser damage resistance of diamond-like thin films. Background technique: [0002] Diamond-Like Carbon (DLC) film is a low-mobility semiconductor material with an amorphous metastable structure, its bandgap width is generally lower than 2.7eV, and its structure is amorphous carbon. The chemical bonds in the film are mainly are hybrid bonds and hybrid bonds. DLC film has the characteristics of high hardness, small friction coefficient, stable chemical performance, and transparency in the infrared region, and can be applied to harsh environments such as acid rain, sandstorm, and seawater immersion. DLC thin films have been widely used in mechanical electronics, aerospace and other fields, and have very broad application prospects. [0003] In the field of optics, DLC film is mainly used as an anti-refl...

AI Technical Summary

Problems solved by technology

Whether it is pre-treatment or post-treatment, it will more or less affect or change the optical properties of the DLC film itself. Although the anti-laser damage ability of the film is improved after the treatment process, the infrared transmittance and refractive index of the DLC film , extinction coefficient, etc. are also affected at the same time

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