Gripping device for transporting slide trays

Abstract

The invention discloses a gripping device for conveying wafer carrying discs of chemical vapor deposition equipment. The gripping device mainly comprises a base, a guide rod, a rotation arm and a mechanical arm. According to the gripping device for conveying the wafer carrying discs, the circumferential stress of the wafer carrying discs is more uniform in the manner that the wafer carrying discs are evenly hoisted in the circumferential direction, stable conveying of the wafer carrying discs and wafers in the wafer carrying discs is guaranteed, and in addition, by means of reverse application of a swinging guide rod mechanism, the gripping and placing actions of the mechanical arm are achieved. The structure is simple and reliable, operation is more stable and safer compared with manual operation, and the production efficiency is improved.

Description

technical field [0001] The invention relates to the field of semiconductor material manufacturing devices, in particular to a grabbing device used for conveying a carrier disc of a chemical vapor deposition device. Background technique [0002] Chemical vapor deposition (CVD) technology integrates precision machinery, semiconductor materials, vacuum electronics, fluid mechanics, optics, chemistry, and computer disciplines. It is a high-end semiconductor material with high automation, high price and high technology integration. Special equipment for device manufacturing. As an ideal method for the epitaxial growth of compound semiconductor materials, chemical vapor deposition equipment has the characteristics of high quality, good stability, good repeatability, flexible process, and large-scale mass production. It has become the key core for the production of semiconductor optoelectronic devices and microwave devices in the industry. The equipment has broad application prosp...

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Problems solved by technology

[0003] In the operation of existing CVD equipment, most of the CVD technicians use the gloves of the glove box to pick and place the slide tray. The operation is inconvenient, not stable and safe enough, and it is highly dependent on the operating proficiency of the personnel, and the efficiency Low; in the equipment of some manufacturers, such as the multi-chamber metal-organic chemical vapor deposition (MOCVD) equipment of American Veeco, the tray-type manipulator is used to transfer and transport the loading plate, which greatly improves the production efficiency, but the structure of the tray-type manipulator is complicated and cannot be used. Uniform force in the circumferential direction of the loading plate

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