Bias power supply device and electron beam current adjusting method therefor

Abstract

The invention provides a bias power supply device and an electron beam current adjusting method therefor, and relates to the technical field of bias power supplies of electron beam processing equipment. The device comprises a power frequency rectifier and filter circuit, a first inverter, rectifier and filter circuit, a second inverter circuit, a resonant converter circuit, a biasing transformer and a second rectifier and filter circuit, wherein the biasing transformer comprises a primary winding magnetic core and a secondary winding magnetic core, which are separated from each other; a primary winding of the biasing transformer is wound on the primary winding magnetic core; a secondary winding is wound on the secondary winding magnetic core; an input end of the power frequency rectifier and filter circuit is connected with an three-phase AC; the power frequency rectifier and filter circuit, the first inverter, rectifier and filter circuit, the second inverter circuit, the resonant converter circuit and two ends of the primary winding of the biasing transformer are sequentially connected with one another; two ends of the secondary winding of the biasing transformer are connected with the second rectifier and filter circuit; a negative output end of the second rectifier and filter circuit is connected with an electronic gun grid; a positive output end is connected with a negative terminal of a high-voltage power supply; and a positive terminal of the high-voltage power supply is grounded.

Description

technical field [0001] The invention relates to the technical field of bias power supply for electron beam processing equipment, in particular to a bias power supply device and an electron beam current regulating method thereof. Background technique [0002] The bias power supply is the core device for adjusting the beam current of the vacuum electron beam processing equipment, and provides negative bias voltage for the electron gun grid. The key technology of the bias power supply lies in the structural design of the bias transformer. The bias transformer needs to consider not only improving the withstand voltage strength of the primary and secondary sides, but also reducing leakage inductance, improving electromagnetic coupling efficiency, and reducing resonance. However, improving the compressive strength and reducing the leakage inductance are contradictory issues, and it is difficult to take care of them at the same time. [0003] At present, the conventional manufactu...

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Problems solved by technology

[0005] The embodiment of the present invention provides a bias power supply device and its electron beam current adjustment method to solve the discharge caused by the current bias transformer due to the aging of the insulating material, the increase of dirt deposited on the surface of the skeleton, and the decrease of the withstand voltage level of the transformer oil. The probability increases and the problem that affects the normal operation of the equipment

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