Oil-shield temperature automatic control apparatus
An automatic control device and automatic controller technology, applied in ion implantation plating, metal material coating process, coating, etc., can solve problems such as unsatisfactory shielding effect, inability to adjust shielding temperature, oil pollution, etc., to reduce oil pollution Pollution, wide range, and easy-to-use effects
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Embodiment 1
[0010] An automatic control device for oil shielding temperature described in Embodiment 1, such as figure 1 and figure 2 As shown, it includes a vacuum support 2, a vacuum sealing end face 5 which cooperates with the vacuum support to form a vacuum state, an adjustment guide rail 3 arranged between the vacuum support and the vacuum sealing end face, and one end of the adjustment guide rail passes through the end face of the vacuum support and is connected to the adjustment guide rail. Adjustment motor 1, evaporator 4 fixed on the adjustment guide rail and built-in heating rod, nozzle 6 and integrated sensor 7 on the evaporator, solenoid valve 8 on the nozzle; An automatic oil shielding temperature controller connected to a heating rod and an integrated sensor is provided; the automatic oil shielding temperature controller is composed of a starting unit 9, an oil film thickness setting unit 10 connected with the starting unit and setting the oil film thickness, and an oil fil...
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