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Indium tin oxide coating method

An indium tin oxide and color filter technology, applied in the field of semiconductor manufacturing, can solve the problems of low coating yield, excessive indium tin oxide resistance, etc.

Inactive Publication Date: 2016-02-17
TRULY HUIZHOU SMART DISPLAY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, in the production process of using magnetron sputtering to plate indium tin oxide on the back of the color filter, the resistance of indium tin oxide often exceeds the standard, and the coating yield is low

Method used

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Embodiment Construction

[0024] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein in the description of the present invention is only for the purpose of...

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Abstract

An indium tin oxide coating method comprises the following steps that S110, a color filter is arranged in a magnetron sputtering vacuum cavity provided with an indium tin oxide target; S120, the vacuum cavity is vacuumized; S130, work gas is introduced and stabilized for 3-30 s; S140, the work gas is electrified, the surface magnetic field strength of the indium tin oxide target is controlled, and an indium tin oxide coating is formed on the color filter; and S150, introduction of work gas and electrification are stopped, the color filter coated with the indium tin oxide coating is taken out, a to-be-processed next color filter is prepared, and the step S110 continues to be executed. By means of the indium tin oxide coating method, the cleanliness of the vacuum cavity can be guaranteed, the influences of impurities on the coating process are avoided, and therefore the phenomenon that the resistance of the color filter coated with the indium tin oxide coating exceeds the standard can be effectively avoided, and the coating yield is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to an indium tin oxide coating method. Background technique [0002] Liquid crystal display is a flat and ultra-thin display device placed in front of the light source or reflective surface. Its main principle is to stimulate liquid crystal molecules with current to generate points, lines, and surfaces to form a picture with the back lamp tube. Liquid crystal displays consume very little power, so they are widely used in electronic devices that run on batteries. However, the existing liquid crystal display generates static electricity during use. The static electricity itself generates an electric field, which affects the internal electric field of the liquid crystal display, and further affects the current that stimulates the liquid crystal molecules, resulting in distortion of the display screen of the liquid crystal display. [0003] In order to eliminate th...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/35
Inventor 陈建伦黄伟东邓泽新刘力明李建华
Owner TRULY HUIZHOU SMART DISPLAY
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