Metal-doped amorphous carbon film temperature-sensing element and preparation method therefor

A technology of metal doping and sensing elements, which is applied in thermometers, metal material coating technology, thermometers with direct heat-sensitive electric/magnetic elements, etc., can solve the limitations of substrate materials, unfavorable component integration, and limited diamond films. Temperature sensor application range and other issues

Active Publication Date: 2016-01-13
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
View PDF4 Cites 8 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the deposition conditions of diamond film are harsh, there are great restrictions on the substrate material, and the adhesion is poor, which also limits the application range of diamond film temperature sensor to a large extent.
[0008] Diamond-like carbon film, the English name is Diamondlikecarbon, referred to as DLC, is a general term for a type of amorphous carbon film, has excellent chemical and mechanical stability, its preparation process is compatible with microelectronics technology, and as NTC (NegativeTemperatureCoefficient), That is, a conductive material with a negative temperature coefficient, with a high TCR value, reaching thousands of ppmK -1 , but at the same time DLC has high room temperature resistivity, which brings great disadvantages to component integration
[0009] Therefore, when metals, traditional Si-based thin films, and traditional amorphous carbon thin films are used as thin-film temperature sensing materials, they cannot simultaneously meet the requirements of high TCR, appropriate room temperature resistance, and certain friction and corrosion protection. Therefore, it is necessary to develop new thin-film temperature sensing materials. Sensing Materials and Temperature Sensing Elements

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Metal-doped amorphous carbon film temperature-sensing element and preparation method therefor
  • Metal-doped amorphous carbon film temperature-sensing element and preparation method therefor
  • Metal-doped amorphous carbon film temperature-sensing element and preparation method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] In this embodiment, the structure of the temperature sensing element is as follows figure 1 shown by Al 2 o 3 Composed of substrate 1, tungsten-doped amorphous carbon film 2 and silver colloidal electrode 3, tungsten-doped amorphous carbon film 2 is located on Al 2 o 3 On the surface of the substrate 1 , the silver glue electrode 3 is located on the surface of the tungsten-doped amorphous carbon film 2 .

[0042] Tungsten-doped amorphous carbon film 2 composed of C diamond phase sp 3 and graphite phase sp 2 Hybrid state, tungsten atoms and / or tungsten carbides, and H atoms, where tungsten atoms and / or tungsten carbides are distributed in sp 2 covalent bond and sp 3 The irregular carbon space network matrix structure formed by covalent bonds.

[0043] The preparation method of the temperature sensing element comprises the following steps:

[0044] (1)Al 2 o 3 The substrate was ultrasonically cleaned with ethanol, dried and placed in a vacuum chamber, pre-evacua...

Embodiment 2

[0052] In this embodiment, the structure of the temperature sensing element is completely the same as that in Embodiment 1.

[0053] In this embodiment, the preparation method of the temperature sensing element is basically the same as that in Embodiment 1, except that the magnetron sputtering target current in step (2) is 1.8A.

[0054] The same as in Example 1, using the four-point method, the relationship between the resistivity of the temperature sensing element prepared above in the range of 278K to 368K as a function of temperature was tested by a comprehensive physical property measurement system (PhysicalPropertyMeasurementSystem, PPMS), and the results are as follows: image 3 As shown, through the following formula:

[0055] T C R = ( R - R 0 ) / R 0 ...

Embodiment 3

[0058] In this embodiment, the structure of the temperature sensing element is as follows figure 1 shown by Al 2 o 3 Composed of substrate 1, copper-chromium co-doped amorphous carbon film 2 and silver glue electrode 3, copper-chromium co-doped amorphous carbon film 2 is located on Al 2 o 3 On the surface of the substrate 1, the silver glue electrode 3 is located on the surface of the copper-chromium co-doped amorphous carbon film 2.

[0059] CuCr-doped amorphous carbon film 2 composed of C diamond phase sp 3 and graphite phase sp 2 Hybrid state, copper, chromium atoms and / or copper chromium carbides, and H atoms, where copper chromium atoms and / or copper chromium carbides are distributed in sp 2 covalent bond and sp 3 The irregular carbon space network matrix structure formed by covalent bonds.

[0060] The preparation method of the temperature sensing element comprises the following steps:

[0061] (1)Al 2 o 3 The substrate was ultrasonically cleaned with ethanol, ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention provides a metal-doped amorphous carbon film temperature-sensing element. The element consists of a base body, a metal-doped amorphous carbon film, and an electrode. The metal-doped amorphous carbon film is located on the surface of the base body, and the electrode is located on the surface of the metal-doped amorphous carbon film. Compared with a conventional temperature-sensing element, the element has an adjustable TCR value and resistivity, can have a high TCR value and excellent mechanical performance and frictional performance at the same time, and can achieve the application in a severe environment.

Description

technical field [0001] The invention belongs to the field of thin-film temperature sensors, in particular to a metal-doped amorphous carbon thin-film temperature sensing element and a preparation method thereof. Background technique [0002] In the 20th century, with the development of integrated circuit technology and microelectromechanical systems (MicroElectroMechanicalSystems, referred to as MEMS), the development of various sensors has entered a new stage. Among them, temperature sensors play a special role in modern information technology and are currently the most widely used type of sensors. [0003] Thin-film temperature sensor is a new type of micro-sensor developed with the maturity of thin-film technology. Compared with bulk temperature sensors, the sensitive element of thin-film temperature sensor is a μm-level thin film, which has the characteristics of small size and short thermal response time. , can accurately measure transient temperature changes, and this...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01K7/18C23C14/35
Inventor 汪爱英郭鹏柯培玲张栋陈仁德郑贺
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap