Silica microlens and its manufacturing method

Abstract

The invention discloses a silicon dioxide micro-lens and a production method thereof. The silicon dioxide micro-lens comprises a substrate layer and a lens layer, wherein the lens layer is arranged on the front surface of the substrate layer. The silicon dioxide micro-lens also comprises an anti-reflection layer I and an anti-reflection layer II, wherein the anti-reflection layer I is covered on the surface of the lens layer, and the anti-reflection layer II is covered on the back surface of the substrate layer. The lens layer comprises a first lens layer and a second lens layer, wherein the second lens layer is wrapped on the first lens layer, and the second lens layer and the first lens layer are fused into an integrated body through high-temperature backflow. The lens layer is made of a boron / phosphorus-doped silicon dioxide material, and such material has good mobility during high-temperature backflow; the second lens layer is wrapped on the first lens layer in a circular truncated cone shape, and the two layers can be fully fused together through high-temperature backflow, and a plano-convex structure is formed naturally; the micro-lens is allowed to have refractive index consistency wholly; and the silicon dioxide micro-lens has the advantages of being good in lens surface shape, high in array fill factor, high in fill factor, simple in process, low in cost, good in product consistency and suitable for large scale production and the like.

Description

technical field [0001] The invention belongs to the technical field of optical devices, and in particular relates to a silicon dioxide microlens and a manufacturing method thereof. Background technique [0002] A lens is a passive optical element used in an optical system to converge and diverge light radiation. Lenses manufactured by traditional techniques are not only complicated in manufacturing method, but also large in size and heavy in weight, which can no longer meet the needs of today's technological development. At present, people have been able to produce lenses with very small diameters, which can only be observed with equipment such as microscopes, scanning electron microscopes, and atomic force microscopes. This is a microlens. Microlenses and microlens arrays have broad application prospects in the fields of optical communication, optical sensing, and optical computing due to their advantages of small size, light weight, easy integration, and array formation. ...

AI Technical Summary

Problems solved by technology

[0008] The invention aims to solve technical problems such as lens surface distortion, background noise, complex process, high cost, difficulty in ensuring product consistency, and unsuitability for large-scale mass production in the existing microlens and microlens array manufacturing technology. Provide a microlens compatible with semiconductor technology, easy to integrate, small in size, low in cost, customizable, suitable for mass production, and a manufacturing method thereof

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