Constant-angle speed changing device applied to vapor-phase deposition of coating of blade and control method
A technology of vapor deposition and speed change device, which is applied in transmission devices, fluid transmission devices, belts/chains/gears, etc. It can solve the problems of reduced plasma concentration, affecting the performance of coatings, and low coating deposition speed, achieving improved Coating uniformity, broadening the application range of equipment, and improving the effect of equipment control accuracy
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[0030] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0031] The principle of this embodiment is that by changing the rotational speed of the blade rotation drive motor, the rotational speed of the blade is associated with the rotation angle. When the shielded surface of the blade is turned to the position facing the ion cluster, the rotational speed of the blade is reduced, and the ion cluster is extended to form a coating. time, thereby improving the situation of uneven coating thickness.
[0032] Next, the rotation angle position of the blade is determined by means of detection. ...
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