Symmetrical type carbon nanotube cathode ionization gauge
A carbon nanotube cathode and ionization gauge technology, applied in particle separation tubes, air pressure measurement discharge tubes, etc., can solve problems such as unfavorable weak ion current signal detection, limiting the development of miniature ionization gauges, and short electron motion paths, and achieving extended electronic Motion path, prolonging the length of electron motion trajectory, and the effect of large emission current
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[0035] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0036] The ionization gauge 1 of the present invention includes a cathode 3, a double gate 4, a double anode 5 and a double collector 6, all electrodes are arranged in parallel and coaxially, and each electrode is insulated from each other, wherein the cathode and 3 are carbon nanotubes with double-sided emission Array structure, the ionization area adopts a symmetrically distributed three-pole structure, the specific structure is as follows figure 2 As shown, it includes cathode 3 , substrate 2 , gate 4 , anode 5 and collector 6 . The cathode array 3 is grown on both sides of the substrate 2 and grown on both sides with the substrate 2 as a symmetric plane, the gate 4 is symmetrically distributed outside the cathode array 3, the anode 5 is installed parallel and symmetrically outside the gate 4, and the ion collector 6 It is installed on the outside of ...
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