Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A kind of ray polarization device and polarization method of electret with high aspect ratio structure

A high-aspect-ratio structure and electret technology, applied in the direction of microstructure devices, manufacturing microstructure devices, microstructure technology, etc., can solve the problems of electret polarization, corona polarization impenetrability, and inability to polarize Electret and other issues to achieve the effect of simple structure

Active Publication Date: 2017-02-01
BEIJING INSTITUTE OF TECHNOLOGYGY
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing classic electret polarization method is corona polarization, which uses the air high-voltage arc discharge mechanism, but the ions generated by corona discharge cannot polarize the electret with high aspect ratio structure due to the charge "aggregation" effect. body; at the same time, corona polarization cannot penetrate the blocked solid medium, so it is impossible to polarize the encapsulated electret

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of ray polarization device and polarization method of electret with high aspect ratio structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0025] Such as figure 1 As shown, the ray-based electret polarization device of this embodiment includes: a protective box 1, a ray generator, a probe station assembly and a high-voltage bias power supply; wherein the protective box 1 includes a metal box shell 11 And the plastic insulating material 12 that adheres on its inner wall; The ray generator includes the ray power supply device 21 that is placed on the outside of the protective box and the ray generating device 22 and the ray irradiation device 23 that are connected to it and are arranged on the top in the protective box; The needle stage assembly includes an insulated probe base 31, an insulated object stage 32, and a position-adjustable probe 33. The probe base 31 is arranged at the bottom of the protective box 1 and faces the ray irradiation device 23. The probe Two position-adjust...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a device and method for polarizing electrets with high-aspect-ratio structures based on rays. The device comprises a protection box, a ray generator, a probe station module and a high-voltage bias power supply, wherein a space between the surfaces of two electrets to be polarized in a ray covering area is filled with high-density plasma; a high-voltage bias electric field is formed between the surfaces, connected to a high voltage end and a grounded end, of the two electrets to be polarized; and positive charges and negative charges in the plasma are separated under the action of the bias high-voltage electric field and move along opposite directions, so that charges of specific electric properties are adsorbed on the surfaces of the two electrets to be polarized. Through adoption of the device and method for polarizing the electrets with high-aspect-ratio structures based on rays, a vacuum environment is not needed; the structure is simple; rapidness and high efficiency are realized; and polarization for the electrets with the high-aspect-ratio structures is realized. Meanwhile, rays can penetrate through a conventional packaging housing, so that the polarization method is not influenced by a packaging process, and the polarization time can be shortened from 5-20 minutes of conventional corona poling to the magnitude of 10 seconds.

Description

technical field [0001] The invention relates to electret polarization, in particular to a ray polarization device and a polarization method for an electret with a high aspect ratio structure. Background technique [0002] Electrets include electret substrates and polarized charges on their surfaces. Polarization technology is the only way to achieve high-density charges for electrets. It plays a decisive role in the performance of electret MEMS and is the primary key technology for research on electret MEMS. Experts and scholars at home and abroad have carried out extensive research on the polarization technology of electrets. The existing classic electret polarization method is corona polarization, which uses the air high-voltage arc discharge mechanism, but the ions generated by corona discharge cannot polarize the electret with high aspect ratio structure due to the charge "aggregation" effect. body; at the same time, corona polarization cannot penetrate the blocked sol...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 冯跃
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com