Nano-material vacuum coating machine
A vacuum coating machine and nano-material technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve problems such as responsibility, low production efficiency, harmful gas, etc., and achieve good coating effect and structure Simple, airtight effect
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[0050] Attached below Figure 1 to Figure 12 , and specific embodiments will further illustrate the present invention.
[0051] Such as Figure 1 to Figure 2As shown, a vacuum coating machine for nanomaterials includes an evaporation furnace 1 for evaporating coating materials into gas, a cracking furnace 2 for cracking gas, and a coating device for coating products, and the coating device includes a vacuum furnace 3. The vacuum pump 4 for evacuating the vacuum furnace 3 and the pressure pump 5 for pressurizing the vacuum furnace 3, the vacuum furnace 3 is connected with the vacuum pump 4 and the pressure pump 5 through pipelines respectively, and the evaporation furnace 1. The cracking furnace 2 and the vacuum furnace 3 are connected through pipelines, and a pneumatic valve 6 is also arranged between the cracking furnace 2 and the vacuum furnace 3 .
[0052] In this embodiment, the nano-coating material is put into the evaporation furnace 1 to evaporate into gas, and then e...
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