Method for rapid detection of SiO2 film thickness and film compact

Abstract

The invention provides a method for rapid detection of SiO2 film thickness and film compact, and relates to the technical field of glass detection. The detection method is as follows: 1) preparing an acidic solution containing HF, HNO3 and DI water in a ratio of 2.4%:1.6%:96%, and storing the acidic solution in a plastic cup; 2) cutting a sample to be tested into small pieces, and attaching two parallel tapes with spacing of 1mm to the surface to form a step, compacting the tapes along the same direction and keeping the step edges smooth; 3) heating a water bath, setting the temperature to 30 DEG C, and heating the plastic cup filled with acidic solution in the water bath; and confirming the temperature of the acidic solution reaching 30+ / -2 DEG C; and 4) soaking the step into the acidic solution with specified temperature, and detecting the etching rate at the soak time of 50s, 70s, 90s and 110s. The method can directly use adverse glass in the production line in the production process for test again, does not need an oil pen line for production of sample steps, and greatly improves test efficiency and productivity.

Description

technical field [0001] The invention relates to the technical field of rapid detection of film thickness and film compactness in the industrial production of magnetron sputtering coating, in particular to a rapid detection of SiO 2 The method of film thickness and film compactness. Background technique [0002] With the rapid development of the electronic information industry, smart home applications are becoming more and more extensive, and more and more instruments are used in home appliance displays. Generally, LCD liquid crystal display and touch products need to be covered with a layer of SiO before plating ITO. 2 The film can prevent the precipitation of sodium ions and enhance the adhesion. In industrial production, oil-based pens are used to make steps to test the physical properties and film thickness. [0003] At present, most of the industry uses oil-based pens to make samples for coating. After the completion, erase the marks of the oil-based pen to make steps. ...

AI Technical Summary

Problems solved by technology

[0003] At present, most of the industry uses oil-based pens to make samples for coating. After the completion, erase the marks of the oil-based pen to make steps. The depth of the test steps is the physical film thickness. However, this method needs to make samples and cannot quickly test the film thickness. And this method can only test the physical properties and thickness of the film layer, but cannot evaluate the compactness of the film layer

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