Method for preparing and transferring ultrathin perforated anode alumina template

An anodized aluminum oxide transfer method technology, applied in the field of microelectronics, can solve the problems of difficult single-crystal nano-dot materials, anodized aluminum oxide templates cannot be used to prepare single-crystal nano-dot arrays, etc., to achieve uniform distribution, prevent cracking, and pore size consistent effect

Inactive Publication Date: 2015-06-24
XIDIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a preparation and transfer method of an ultra-thin through-hole anodized aluminum template to solve the problem that the existing anodized aluminum template cannot be used to prepare single-crystal nano-dot arrays, and it is difficult to transfer to other substrates to prepare single-crystal nano-dot arrays. Problems with crystalline nanodot materials

Method used

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  • Method for preparing and transferring ultrathin perforated anode alumina template
  • Method for preparing and transferring ultrathin perforated anode alumina template
  • Method for preparing and transferring ultrathin perforated anode alumina template

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Effect test

Embodiment 1

[0026] Embodiment 1: A substrate of an anodized aluminum oxide template with an ultra-thin through-hole with a pore diameter of 73nm was fabricated.

[0027] Step 1: Pre-treat the aluminum sheet.

[0028] 1a) Put the aluminum sheet with 99.999% purity into acetone, water and isopropanol solution successively and ultrasonically remove the grease on the surface for 5 minutes each;

[0029] 1b) Put the ultrasonically finished aluminum sheet into a mixed acid solution, soak it at 60°C for 30 seconds to remove impurities on the surface, the proportion of the mixed acid solution is: 20mL of concentrated hydrochloric acid, 10mL of concentrated nitric acid, 1mL of hydrofluoric acid , water 69mL;

[0030] 1c) Put the aluminum sheet from which surface impurities have been removed into the polishing solution, and polish it at 20V for 4 minutes in constant voltage mode to make the aluminum sheet smooth. The polishing solution is composed of 25mL perchloric acid stock solution and 75mL ab...

Embodiment 2

[0049] Embodiment 2: A substrate of an anodized aluminum oxide template with an ultra-thin through-hole with a pore diameter of 76nm was fabricated.

[0050] Step A: Pretreat the aluminum flakes.

[0051] A1) Put the aluminum sheet with 99.999% purity into acetone, water and isopropanol solution successively and ultrasonically remove the grease on the surface for 7 minutes each;

[0052] A2) Put the ultrasonically finished aluminum sheet into a mixed acid solution, soak it at 60°C for 32 seconds to remove impurities on the surface, the ratio of the mixed acid solution is: concentrated hydrochloric acid 20mL, concentrated nitric acid 10mL, hydrofluoric acid 1mL , water 69mL;

[0053] A3) Put the aluminum sheet from which surface impurities have been removed into the polishing solution, and polish it at 20V for 4 minutes and 30 seconds in constant voltage mode to make the aluminum sheet smooth. The polishing solution is composed of 25mL perchloric acid stock solution and 75mL ...

Embodiment 3

[0070] Embodiment 3: A substrate of an anodized aluminum oxide template with an ultra-thin through-hole with a pore diameter of 79nm was fabricated.

[0071] Step 1, pretreating the aluminum sheet.

[0072] First put the 99.999% pure aluminum sheet into acetone, water and isopropanol solutions for 10 minutes to remove the surface grease; then put the aluminum sheet after ultrasonication into the mixed acid solution and soak it at 60°C The impurities on the surface are removed in 35 seconds. The ratio of the mixed acid solution is: 20mL of concentrated hydrochloric acid, 10mL of concentrated nitric acid, 1mL of hydrofluoric acid, and 69mL of water. Polish at 20V for 5 minutes to make the aluminum sheet flat. The polishing solution is mixed with 25mL of perchloric acid stock solution and 75mL of absolute ethanol.

[0073] Step 2: Oxidize the pretreated aluminum sheet by constant voltage direct current mode.

[0074] First put the polished aluminum sheet into the oxalic acid so...

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Abstract

The invention discloses a method and technique for preparing and transferring an ultrathin perforated anode alumina template and aims to mainly solve the problem that an existing anode alumina template cannot be used for directly preparing a mono-crystal nanometer point array. The method comprises the following steps: oxidizing an electrochemically-polished aluminum plate twice in an oxalic acid solution; oxidizing twice again, spin-coating polystyrene PS on the surface of anode alumina and removing an aluminum base and a barrier layer from the bottom surface of the anode alumina to obtain a perforated anode alumina template; finally transferring the template to a substrate of a subsequent required growth material; removing the spin-coated polystyrene PS from the surface by using chloroform to obtain a base plate of the perforated anode alumina template. The base plate of the perforated anode alumina template, obtained by the method disclosed by the invention, is uniformly distributed and uniform in hole diameter; the thickness of the template is nanometer grade; in comparison with the micrometer-grade thickness in the prior art, the thickness of the template prepared by the method disclosed by the invention can guarantee the adhesion between the template and the substrate, and the template can be used for preparing the mono-crystal nanometer point array.

Description

technical field [0001] The invention belongs to the technical field of microelectronics, and in particular relates to a method for preparing an alumina template, which can be used for preparing single-crystal nano-dot arrays. Background technique [0002] Aluminum is a relatively active metal, which can form an oxide film with a thickness of several hundred nanometers in the air. This oxide film is amorphous, thin and porous, and has low mechanical strength, which cannot meet the requirements of functional applications. In order to obtain The aluminum oxide film with special functions must treat the aluminum surface, use aluminum as the anode and then perform electrolytic treatment to form an oxide film on the aluminum surface, which is called aluminum anodic oxidation. Anodized aluminum film is divided into two types: barrier type and porous type. Usually, anodic oxidation in neutral electrolyte can obtain dense barrier oxide film, while in acidic electrolyte such as oxalic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D11/12C25D11/24C25D11/16
CPCC25D11/045C25D11/12C25D11/16C25D11/24
Inventor 陆小力张吉文王东张进成郝跃
Owner XIDIAN UNIV
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