Magentic recording medium for heat assisted recording and method for fabricating same
一种磁记录介质、记录方式的技术,应用在磁记录、磁记录层、数据记录等方向,能够解决磁记录层劣化、不适合实用等问题
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Embodiment 1
[0054] In embodiment 1, such as figure 2 As shown, a non-magnetic substrate 1, a Co-based soft magnetic substrate layer 2, a base layer 3 made of Ru, CoCrPt-SiO 2 The granular magnetic recording layer 4, the first lower protective layer 5a made of Si, and the first lower protective layer 5a made of SiO 2 A magnetic recording medium consisting of a first upper protective layer 5b, a second protective layer 6 made of DLC, and a lubricating layer (not shown).
[0055] Below, based on figure 1 and figure 2 Examples will be described. As the non-magnetic substrate 1 , a disk-shaped chemically strengthened glass substrate (HOYA Co., Ltd. N-10) with a smooth surface was used. First, the cleaned non-magnetic substrate 1 is introduced into a film forming apparatus. Film formation from the soft magnetic substrate layer 2 to the second protective layer 6 is not exposed to the atmosphere, and all film formation is performed in an in-line film formation apparatus.
[0056] In an Ar...
Embodiment 2
[0062] Except for using Al as the material of the first protective layer 5 and changing the film thickness of the second protective layer 6 to 2.0 nm, 1.5 nm, 1.0 nm, and 0.5 nm, it was prepared in the same manner as in Example 1, and evaluated. The results are shown in Table 2.
Embodiment 3
[0064] Except having used Cu as the material of the 1st protective layer 5, and having set the film thickness of the 2nd protective layer 6 to 2.0 nm, 1.5 nm, 1.0 nm, and 0.5 nm, it produced similarly to Example 1, and evaluated it. The results are shown in Table 2.
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