Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate

Abstract

The invention discloses a single-sided continuous winding magnetron sputtering coating automatic production line for a flexible substrate and belongs to the field of coating equipment. The production line comprises an uncoiling room, a rolling room and a coating vacuum room, wherein an unreeling storage room is further arranged between the uncoiling room and the coating vacuum room; a rolling storage room is further arranged between the rolling room and the coating vacuum room; a heat seal mechanism is arranged in front of the unreeling storage mechanism; a cutting mechanism and a substrate steering mechanism are sequentially arranged behind the rolling storage mechanism; one end of a substrate wound on an uncoiling roller is wound on a rolling roller sequentially through the heat seal mechanism, the unreeling storage mechanism, a pre-treatment mechanism, a cold roller, a rolling storage mechanism and the cutting mechanism as well as the substrate steering mechanism. By virtue of material preparation in advance for uncoiling and roller preparation in advance for rolling, multiple substrates are continuously coated by combining the unreeling storage mechanism and the rolling storage mechanism, so that the time for changing rolls and vacuumizing is shortened, and the coating efficiency is greatly improved.

Description

Technical field [0001] The invention relates to a coating production equipment, and more specifically, to an automatic production line for single-sided continuous winding magnetron sputtering coating of a flexible substrate. Background technique [0002] The vacuum winding coating technology is a technology in which one or more films with certain functions are prepared on the surface of the coil substrate by thermal evaporation or magnetron sputtering in a vacuum chamber. Vacuum winding coating equipment mainly has the following characteristics: First, the substrate to be coated is a flexible substrate, that is, it can be wound; second, the coating process is continuous, that is, the coating is continuous in a working cycle; Third, the coating process is carried out in a high vacuum environment. During the unwinding and rewinding process of the coil coating machine, the surface of the substrate is coated with a film. The structure of the coating is the working part of the vacuum...

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Problems solved by technology

[0006] The purpose of the present invention is to overcome the above-mentioned deficiencies of the existing magnetron sputtering winding coating equipment, and to provide an automatic production line for continuous winding magnetron sputtering coating on one side of a flexible substrate. Prepare rolls in advance for material preparation and rewinding, combined with uncoiling and rewinding material storage mechanism to realize continuous coating of multi-roll substrates, save the time for intermediate roll change and vacuuming, greatly improve coating efficiency, and reduce The waste of base materials caused by changing rolls reduces the cost of coating; at the same time, the use of back-switching target devices enables timely and rapid replacement of cathode targets without opening the coating vacuum chamber, providing for the continuous coating of multi-roll base materials Guaranteed

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