Aluminum alloy thin water channel cover plate and thick vacuum cavity water channel welding technology

Abstract

The invention discloses an aluminum alloy thin water channel cover plate and thick vacuum cavity water channel welding technology and belongs to the technical field of welding technologies. The welding technology includes the following steps that first, before gas shielding welding, pollutants on a weldment groove and in the range away from the two sides of the groove by 30-50 mm are cleared away through acetone, a water channel cover plate and a vacuum cavity are preheated at the temperature of 180-240 DEG C, and it is guaranteed that the preheating temperature is uniform; second, in the welding process of gas shielding welding, the energy of a welding line is controlled within 20-25 kJ / cm; third, after gas shielding welding, arc craters are filled with matter when welding ends, time of shielding gas is prolonged, and penetration detection is performed after welding. Through the welding technology, the cooling speed of a weld pass can be reduced, hydrogen can overflow fully, and welding gas holes are effectively controlled. Due to preheating before welding, the cover plate and the cavity are heated evenly, and welding deformation is effectively controlled.

Description

technical field [0001] The invention belongs to the technical field of welding technology, and in particular relates to a welding process of an aluminum alloy thin water channel cover plate and a thick vacuum chamber body water channel. Applicable to the welding technology of aluminum alloy vacuum chamber water channel in the manufacturing industry of IC equipment (special production equipment for the production of semiconductor devices, integrated circuit chips and flat panel displays), it is a professional technology for welding aluminum alloy thin water channel cover plate and thick vacuum chamber water channel . Background technique [0002] Aluminum alloy vacuum cavity sealing channel welding has its special importance. Aluminum alloy welding itself is prone to defects such as pores and cracks due to its special physical properties. The welding of the aluminum alloy vacuum chamber sealing water channel adds to the difficulty of welding. When the aluminum alloy changes...

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Problems solved by technology

[0003] In view of the above-mentioned technical problems, in order to solve the problem of low welding success rate of the aluminum alloy vacuum chamber water channel of IC equipment, the aluminum alloy thin water channel cover plate and the thick vacuum cavity water channel are welded, and the aluminum alloy thin water channel cover plate and the thick cavity body are welded. Welding successful welding provides reference

Using general welding equipment, by adjusting the welding process parameters, a good welding effect can be obtained, and the problem of difficult welding of aluminum alloy vacuum chamber water channel can be solved

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