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Gyroscope system and compensation device for cross coupling and electric coupling thereof

A technology of orthogonal coupling and compensation device, applied in the field of gyroscope system, can solve the problems affecting the dynamic range and noise performance of the gyroscope system, and the interference of useful signals, so as to avoid the influence of the dynamic range and noise performance, improve the overall performance, The effect of eliminating distractions

Inactive Publication Date: 2015-05-13
MEMSLINK MICROELECTRONICS
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The two non-ideal coupling effects of the above-mentioned orthogonal coupling term and electrical coupling term will interfere with useful signals and affect the overall dynamic range and noise performance of the gyroscope system

Method used

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  • Gyroscope system and compensation device for cross coupling and electric coupling thereof
  • Gyroscope system and compensation device for cross coupling and electric coupling thereof

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Embodiment Construction

[0019] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0020] Such as figure 1 As shown, the compensation device 10 for quadrature coupling and electrical coupling of the gyroscope system according to the embodiment of the present invention includes a quadrature coupling compensation module 1 and an electrical coupling compensation module 2, wherein the quadrature coupling compensation module 1 and the electrical coupling The compensation module 2 is located in the gyroscope sensor chip 30 in the gyroscope system and connected with the gyroscope head 20 of the gyroscope sy...

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Abstract

The invention discloses a gyroscope system and a compensation device for cross coupling and electric coupling thereof. The compensation device comprises a cross coupling compensation module and an electric coupling compensation module, wherein the cross coupling compensation module is positioned in a gyroscope sensor chip, is connected with a gyroscope header, is used for compensating an error caused by a mechanical cross coupling term applied to the gyroscope sensor chip and comprises a first charge sensitive amplifier and a first gain amplifier; the electric coupling compensation module is positioned in the gyroscope sensor chip, is connected with the gyroscope header and is used for compensating an error generated by a parasitic capacitance between a driving feedback electrode and a sensing detection electrode of the gyroscope header; and the electric coupling compensation module comprises a buffer and a second gain amplifier. According to the invention, the mechanical cross coupling term caused by a gyroscope header manufacturing process and an electric coupling term caused by the parasitic capacitance are compensated and interference of the two terms on useful signals is eliminated.

Description

technical field [0001] The invention relates to the technical field of gyroscope systems, in particular to a gyroscope system and a compensation device for orthogonal coupling and electrical coupling thereof. Background technique [0002] In the gyroscope system, on the one hand, due to the deviation of the manufacturing process of the gyroscope head, the sensing branch of the gyroscope sensor chip will be affected by the mechanical orthogonal coupling term; In the package, there is a parasitic capacitance Cp between the driving feedback electrode and the sensing detection electrode. Due to the influence of this capacitance, the output voltage signal of the driving feedback can be coupled to the sensing branch. [0003] The two non-ideal coupling effects of the above-mentioned orthogonal coupling term and electrical coupling term will interfere with useful signals and affect the overall dynamic range and noise performance of the gyroscope system. Contents of the invention ...

Claims

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Application Information

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IPC IPC(8): G01C19/00G01C25/00
CPCG01C19/00G01C25/00
Inventor 张晰泊
Owner MEMSLINK MICROELECTRONICS
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