Membrane stress testing device and method
A film stress, testing device technology, applied in the measurement of permanent deformation force through measuring gauges, etc., can solve problems such as affecting measurement accuracy, microstructure deformation, and increasing measurement error.
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[0025] The present invention will now be further described with reference to the drawings and specific embodiments.
[0026] As a specific example, such as figure 1 As shown, a thin film stress test device of the present invention is prepared on a substrate by ICP etching technology, and includes at least two fixed ends 1 of an axisymmetric design. The two fixed ends 1 include a sacrificial layer formed on the substrate. And the thin film to be tested formed on the sacrificial layer. The number of the fixed ends 1 is 2-4, but this embodiment uses two fixed ends 1. Each fixed end 1 is connected to a fixed beam 2, and the other free end of each fixed beam 2 is fixed by a fixed beam 2. The beam connection neck 3 is connected with one end of a cantilever beam 9 at an included angle, and the range of the included angle is 40°-90°, and 90° is used in this embodiment. The design of different included angles has an impact on the miniaturization and torque balance of the entire product. ...
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