Precision motion control system and control method thereof

Abstract

The invention relates to a precision motion control system and a control method thereof. The system comprises a control core module, a sensor input module, a high-voltage driving output module, a multichannel signal acquisition module, an executor module, a controlled object and a host computer screen display module. The output end of the sensor input module is connected with the input end of the control core module through the multichannel data acquisition module; the output end of the control core module is connected with the input end of the high-voltage driving output module; the host computer screen display module is in bidirectional connection with the control core module; the output end of the high-voltage driving output module is connected with the input end of the executor module; the output end of the executor module is connected with the input end of the controlled object and drives the controlled object; and the output end of the controlled object is connected with the input end of the sensor input module.

Description

technical field [0001] The invention belongs to the technical field of displacement data acquisition, in particular to a precision motion control system and a manufacturing method thereof. Background technique [0002] With the development of science and technology, especially the rapid development of MEMS technology, motion and positioning control at the nanometer or even sub-nanometer level has become possible. This provides a powerful tool for human beings to understand and use the microcosm. The so-called nano-displacement positioning technology refers to the precise control of the controlled object (micro-processing tool or micro-measurement tool) at the level of nanometer precision to meet its requirements for positioning accuracy, motion accuracy and precision stability, and to achieve measurement functions. Processing and inspection operations. The application of motion control technology is mostly realized by various forms of motion platform mechanisms or products...

AI Technical Summary

Problems solved by technology

[0003] The control method based on single-chip microcomputer has appeared in the 1980s, but most of the application occasions are in the fields that require system operation accuracy and low operating cost. The real-time performance of the calculation and operation speed of single-chip microcomputer is poor. It can only be used in low-speed point-to-point motion and control occasions with low requirements on the running track

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