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Molybdenum alloy target preparation method

A molybdenum alloy and target technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of high impurity content and low density, and achieve good alloying performance, low oxygen content and dense good effect

Active Publication Date: 2015-03-25
SHANDONG HAO XUAN ELECTRONICS CERAMIC MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The powder sintering method makes the target material uniform in composition, but there are problems such as low density and high impurity content

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] (1) Select raw materials, and initially mix molybdenum powder with niobium and tantalum through a V-type mixer, the atomic ratio is Mo:Nb:Ta=92:4:4, and then put the mixed powder in a high-energy ball mill ball milling;

[0051] (2) Put the ball-milled raw material powder into a rubber sheath for cold isostatic pressing, the cold isostatic pressing pressure is 120MPa, and the pressing time is 20 minutes;

[0052] (3) Pack the pressed powder into the ladle cover, and reserve 24 air holes in the ladle cover;

[0053] (4) Carry out the first-stage degassing of the ladle cover, the degassing temperature is 250 degrees, the degassing time is 12 hours, the second-stage hydrogen reduction temperature is 680 ° C, the reduction time is 8 hours and the third-stage degassing treatment temperature is 720 ° C, degassing The air time is 18 hours, and then all the air holes are sealed;

[0054] (5) Place the manufactured sheath in a hot isostatic pressing machine for hot isostatic p...

Embodiment 2

[0058] (1) Select raw materials, and initially mix molybdenum powder with niobium, tungsten, vanadium, zirconium, and chromium through a V-shaped mixer, and the atomic ratio is Mo:Nb:W:V:Zr:Cr=90:5:1:2 :1:1, and then place the mixed powder in a high-energy ball mill for ball milling;

[0059] (2) Put the ball-milled raw material powder into a rubber sheath for cold isostatic pressing, the cold isostatic pressing pressure is 100MPa, and the pressing time is 30 minutes;

[0060] (3) Pack the pressed powder into the ladle cover, and reserve 26 air holes in the ladle cover;

[0061] (4) Carry out the first-stage degassing of the ladle cover, the degassing temperature is 230 degrees, the degassing time is 8 hours, the second-stage hydrogen reduction temperature is 650 ° C, the reduction time is 12 hours and the third-stage degassing treatment temperature is 700 ° C, degassing The air time is 11 hours, and then all the air holes are sealed;

[0062] (5) Place the manufactured shea...

Embodiment 3

[0066] (1) Select raw materials, initially mix molybdenum powder with niobium, neodymium, and titanium through a V-type mixer, the atomic ratio is Mo:Nb:Nd:Ti=90:6:1:3, and then mix the powder The body is placed in a high-energy ball mill for ball milling;

[0067] (2) Put the ball-milled raw material powder into a rubber sheath for cold isostatic pressing, the cold isostatic pressing pressure is 150 MPa, and the pressing time is 30 minutes;

[0068] (3) Pack the pressed powder into the ladle cover, and reserve 20 air holes in the ladle cover;

[0069] (4) Carry out the first-stage degassing of the ladle cover, the degassing temperature is 240 degrees, the degassing time is 10 hours, the second-stage hydrogen reduction temperature is 680 ° C, the reduction time is 18 hours and the third-stage degassing treatment temperature is 720 ° C, degassing The air time is 12 hours, and then all the air holes are sealed;

[0070] (5) Place the manufactured sheath in a hot isostatic pres...

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PUM

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Abstract

The invention belongs to the technical field of material processing, and particularly relates to a molybdenum alloy target preparation method. Alloy powder is formed by molybdenum powder and other metal powder in a mechanical alloying mode, the alloy powder is processed, and a molybdenum alloy target is obtained. The mechanical alloying process is adopted, so that distribution uniformity and alloying performance of the powder raw materials are better; hot isostatic pressing is conducted after cold isostatic pressing, so that the compactness of the molybdenum alloy target is better; through the multi-stage degassing process, the oxygen content of the molybdenum alloy target is lower, and the degassing performance is better.

Description

technical field [0001] The invention belongs to the technical field of material processing, and in particular relates to a method for preparing a molybdenum alloy target. Background technique [0002] Molybdenum is a gray transition metal belonging to the refractory metal, which is located in the VIA subgroup of the periodic table of elements, with an ordinal number of 42 and an atomic weight of 95.94. Molybdenum and its alloys have excellent electrical conductivity and thermal stability. The use of molybdenum alloys as electrodes, wiring materials or barrier materials in TFT manufacturing has great application prospects. The advantage of using molybdenum alloy sputtering target is to improve the specific brightness, contrast, color and life of the device. More importantly, using molybdenum sputtering targets is more environmentally friendly than using chromium sputtering targets. Therefore, molybdenum and its alloys have replaced chromium and are used in the manufacture ...

Claims

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Application Information

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IPC IPC(8): B22F3/14C23C14/35
Inventor 宋爱谋钟小亮
Owner SHANDONG HAO XUAN ELECTRONICS CERAMIC MATERIALS
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