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Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof

An electronic skin and three-dimensional flexible technology, applied in the field of sensors, can solve problems such as complex manufacturing process, low sensitivity and signal strength, and human toxicity, and achieve the effect of using health

Inactive Publication Date: 2015-02-18
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, electronic skins are facing many challenges: the sensitivity and signal strength of existing electronic skins to strain are generally low, heavy metals such as gold and silver are toxic to the human body, and the manufacturing process is complicated, making it difficult to form a mature application

Method used

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  • Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof
  • Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof
  • Electronic skin based on three-dimensional flexible substrate graphene and preparing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] (1) Using methane as the carbon source gas, hydrogen as the carrier gas, and Cu foil as the growth substrate, graphene films were grown in a high-temperature tube furnace. The growth temperature is 1000°C, the air pressure is maintained at about 1×103Pa, and the growth time is 20 minutes to grow a single-layer graphene film.

[0044] (2) A flexible PDMS substrate with a three-dimensional surface structure is produced by molding equipment. The surface structure is a curved surface convex array structure with a structure size of about 100 microns, and the copper foil with graphene grown on it is pressed on the flexible PDMS substrate. Together, the Cu foil was removed by FeCl3 solution etching, and the graphene was transferred to the three-dimensional flexible PDMS surface; finally, it was placed on a hot plate at 80°C for 20 minutes to remove water vapor and make the graphene closely adhere to the PDMS surface.

[0045] (3) Electrodes will be made by printing with silver...

Embodiment 2

[0049] (1) Using methane as the carbon source gas, hydrogen as the carrier gas, and Ni foil as the growth substrate, a graphene film was grown in a high-temperature tube furnace. The growth temperature is 950°C, the air pressure is maintained at about 1×103Pa, and the growth time is 30 minutes to grow a graphene film with multiple layers of carbon atoms.

[0050] (2) The specific method of transferring graphene on the PET film surface with a flat surface is: attaching thermal release tape on the surface of graphene / Ni substrate, removing the Ni foil in the Ni etching solution, and transferring the graphene to the heat Release the surface of the tape, then attach it to the PET surface, heat at 110° C. for 5 minutes, the thermal release tape is detached, and the graphene is transferred to the surface of the PET film.

[0051] (3) The steps of making a PDMS substrate with a three-dimensional surface structure and transferring graphene are as follows: a flexible PDMS substrate with ...

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Abstract

The invention relates to electronic skin based on three-dimensional flexible substrate graphene and a preparing method thereof. The graphene electronic skin comprises two flexible substrates and graphene films covering the inner surfaces of the flexible substrates. When the three-dimensional flexible substrates are subjected to external action force such as squeezing and stretching, the contact area of the upper graphene layer and the lower graphene layer is changed, so that change of the contact resistance between the two layers is caused directly, and then the shape change of the electronic skin under external force is reflected by reading a voltage or current signal. The electronic skin based on the three-dimensional flexible substrate graphene is transparent and has the advantages of being ultralight, ultrathin, capable of saving energy and the like. The graphene is environmentally friendly, poisonless and compatible with the human body and can be used on the human skin in a more healthy way.

Description

technical field [0001] The invention belongs to the field of sensors, and relates to an electronic skin based on three-dimensional flexible substrate graphene and a preparation method thereof. Background technique [0002] Electronic skin is a sensor device that can sense external pressure and conduct tactile signals like human skin. Electronic skin has good application prospects in many aspects. Electronic skin could be used to improve prosthetics that currently have no sentience. The electronic skin is applied to the robot to make the robot have a sense of touch, which can be covered on the surface like clothes, allowing the robot to perceive the orientation, shape, hardness and other information of the object. Since the "Sensitive Skin Workshop" determined the global electronic skin development framework, with more than 10 years of rapid development, electronic skin has become a master of the development and application of flexible electronics. In particular, Professor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20
Inventor 魏大鹏杨俊邵丽史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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