Implanted type flexible sensor based on organic transistor and preparation method
A flexible sensor, organic transistor technology, applied in sensors, instruments, scientific instruments, etc., can solve the problems of inflexibility of sensors and inability to implant brain tissue, and achieve the effect of improving the level of diagnosis and treatment
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[0042] see figure 2 and refer to figure 1 , the invention provides a method for preparing an implantable flexible sensor based on an organic transistor, the steps of which are:
[0043] (1) Deposit aluminum on the silicon substrate as the first layer of sacrificial layer, the thickness of aluminum is 100nm-1000nm; then deposit the first layer of flexible polymer as the substrate support layer 10, the material of the substrate support layer is parylene , the thickness of which is 1 μm-15 μm;
[0044] (2) Then, the left metal source electrode 20 and the right metal source electrode 21 are fabricated on the substrate support layer 10 by photolithography stripping method, the thickness of the left metal source electrode and the right metal source electrode is 20nm-1 μm, and the width is 1 μm- 1mm, with a length of 1 μm-1mm, its main function is to conduct the impedance change of the organic conductive polymer active layer 30; then deposit a second layer of flexible polymer on t...
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