Ultrapure argon online purification system and method

Abstract

The invention discloses an ultrapure argon online purification system and method, belonging to the field of gas purification. According to the technical scheme, the method comprises the following steps: coating a constantan alloy bar with a zirconium-vanadium-iron alloy material, pleating the alloy bar into a folded shape, fixing the alloy bar on a special bracket and framework for a flange plate, arranging the bracket and framework in a stainless steel cylinder, thus forming a non-evapotranspiring argon purification device; connecting the argon purification device with high-purity bottled argon and terminal equipment through related connectors and control valves so as to form an ultrapure argon online purification system; and online activating a getter of the purification device by a vacuum detection and control system of equipment. The application proves that by the system and method, ultrapure argon (99.999999 percent (W / W)) can be obtained on line; the system is good in purification effect, the active and neutral impurity gases in the argon can be reduced from magnitude orders of dozens of ppm to ppb, the operating temperature of the system is low and is generally 160-200 DEG C, water cooling is not needed, and the system and method are safe and convenient to use.

Description

technical field [0001] The invention belongs to the field of gas purification, and in particular relates to an ultra-pure argon online purification system, which is mainly used for the absorption and desorption of impurity gases in the inert gas argon, especially neutral impurity nitrogen, so as to obtain ultra-pure argon. Background technique [0002] Argon is widely used in the field of microelectronic materials and devices due to its unique physical properties and low cost compared to other inert gases. Although high-purity argon with 99.9999% (V / V volume ratio, all V / V not specified below) is available on the market, the control and transportation of pipeline valves during gas distribution, storage and transportation, or use This leads to a reduction in the purity of the argon used in the end use. Taking the analysis of Te samples by glow discharge mass spectrometry as an example, the content of the impurity gas elements C, N, and O in the above-mentioned high-purity ar...

AI Technical Summary

Problems solved by technology

For the neutral impurity nitrogen, it needs 550°C to have the inhalation effect, and the activation temperature is 800°C. The requirements for the purification container are very strict, and it is only suitable for purifying 99.99% argon to the level of 99.9999%, and its output gas cannot meet the trace requirements. Quantitative impurity analysis and other actual process requirements

[0004] Although the Chinese patent "A Argon Purifier of Getter Type" (authorized publication number: CN101070145B) uses zirconium-vanadium-iron material, and crushes Zr-V-Te alloy ingots into 8-20 mesh particles, and 10 The following modified 5A molecular sieves are mixed according to a certain mass ratio and placed in the cylinder of the purification device. Although filters with a pore size of 5 μm are installed at the top and bottom, the tiny particles of the purification material can easily enter the process equipment from the output port of high-purity argon gas, causing Contamination of clean vacuum systems and processes

In addition, it only has a certain purification effect on active impurity gases in argon, but does not involve common neutral impurity gases (such as: N 2 ) to remove

Images