Vacuum spraying target production equipment

Abstract

The invention discloses vacuum spraying target production equipment with a good spraying effect. The vacuum spraying target production equipment comprises a stander, a dust removal recycling device and a numerical control water cooling device, wherein a vacuum pipe is arranged on the stander; a target base material and a plasma spraying gun are arranged in the vacuum pipe; a coating layer thickness measurer, a coating layer temperature measurer, a spraying bin cooling water inlet, a nitrogen protection gas inlet, a negative pressure gas opening, a target surface cooling liquid nitrogen inlet and a vision monitoring opening are arranged on and formed in the vacuum pipe in sequence; the spraying bin cooling water inlet is connected with the numerical control water cooling device through a connection water pipe; the negative pressure gas opening is connected with the dust removal recycling device through a negative pressure pipe; one end of the target base material is connected with one end of a rotating shaft through a joint; the rotating shaft is supported on the stander through a plurality of supporting wheels.

Description

technical field [0001] The invention relates to a target material production equipment, in particular to a target material vacuum spraying production equipment. Background technique [0002] In architectural glass, electronic product display and other industries, coating treatment is carried out on the surface of the product for surface protection. Target materials are required for coating. There are many types of target materials, such as silicon aluminum, titanium oxide, and zinc used on architectural glass. Tin, niobium oxide and other targets, high-purity silicon targets used in electronic product displays, the surface of the target needs to be sprayed during the production process, and now domestic spraying equipment is directly sprayed in the atmosphere, and the surface of raw materials is easy to oxidize , the content of trace elements is uncontrollable, the product quality is low, it cannot meet the requirements of high-end customers, the noise is high, it affect...

AI Technical Summary

Problems solved by technology

[0002] In architectural glass, electronic product display and other industries, coating treatment is carried out on the surface of the product for surface protection. Target materials are required for coating. There are many types of target materials, such as silicon aluminum, titanium oxide, and zinc used on architectural glass. Tin, niobium oxide and other targets, high-purity silicon targets used in electronic product displays, the surface of the target needs to be sprayed during the production process, and now domestic spraying equipment is directly sprayed in the atmosphere, and the surface of raw materials is easy to oxidize , the content of trace elements is uncontrollable, the product quality is low, it cannot meet the requirements of high-end customers, the noise is high, it affects the health of operators, the spraying efficiency is low, the production cost is high, the production cycle is long, the energy consumption is high, the raw materials are not recycled, and the energy saving cannot be met. , environmental requirements

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