Superconducting single-photon detector with phase grating and manufacturing method for superconducting single-photon detector with phase grating
A single-photon detector and phase grating technology, which is applied in the manufacture of semiconductor devices, instruments, and final products, can solve problems such as difficult fabrication, low absorption efficiency, and low detection efficiency of superconducting single-photon detectors, and achieve high detection Efficiency, absorption efficiency improvement effect
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[0022] The present invention will be described in further detail below in conjunction with the accompanying drawings of the description.
[0023] 1. Structure of superconducting single photon detector with phase grating
[0024] Such as figure 1 , figure 2 As shown, a superconducting single photon detector with a phase grating includes a high-resistance silicon substrate 1 , a reflective layer 2 , niobium nitride nanowires 3 and a phase grating 5 . The niobium nitride nanowire 3 is laid on the reflective layer 2 to form a nanowire region. The radiation layer 2 is made of transparent material, specifically silicon dioxide. The radiation layer 2 is laid on the high-resistance silicon substrate 1 and is located between the niobium nitride nanowire 3 and the high-resistance silicon substrate 1 . The thickness L of the radiation layer 2 satisfies Among them, λ is the wavelength of the incident light, n 1 is the refractive index of the reflective layer material, and n is a p...
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