A continuous vacuum ultraviolet light ozone surface cleaning and oxidation modification equipment and its application method

Abstract

The invention discloses a continuous vacuum ultraviolet light ozone surface cleaning and oxidation modification equipment and a using method thereof. Therefore, problems of long process time and low equipment automation degree of the existing ultraviolet light / ozone surface cleaning and oxidation modification equipment can be solved. The provided surface cleaning and oxidation modification equipment consists of a feeding and blanking conveyer system, a preheating chamber, a process chamber, a cooling chamber, a vacuum system, an ultraviolet light source system, and an automatic control and monitoring system. The feeding and blanking conveyer system employs a transmission mode in which chain wheels and chains drive rollers and rollers drive small rolling balls at the rollers to make rotation. The preheating chamber, the process chamber, and the cooling chamber are connected tightly and, together with the feeding and blanking conveyer system, form a continuous structure. The vacuum system employs two vacuum pumps to maintain vacuum environments of all chambers rapidly. According to the invention, the sample cleaning and oxidation modification effects are good; the equipment is secure and reliable and can be operated simply; the automation degree is high; and the production quality and efficiency are substantially improved.

Description

technical field [0001] The invention relates to a continuous vacuum ultraviolet light ozone surface cleaning and oxidation modification equipment and a use method thereof, belonging to the technical field of ultraviolet light surface treatment. Background technique [0002] With the rapid development of science and technology, the high performance and miniaturization of products require higher and higher surface cleanliness. Conventional cleaning methods (such as water washing, chemical solution washing, ultrasonic cleaning, etc.) can no longer meet the requirements. Ultraviolet light / Ozone cleaning can not only achieve the "atomic cleanliness" that is difficult to achieve by conventional cleaning methods, but will not damage the surface of the material, and there is no secondary pollution and waste treatment. At the same time, ultraviolet light / ozone technology utilizes the strong oxidizing properties of ozone to oxidize the surface of some carbon materials (such as graphe...

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Problems solved by technology

[0006] In order to solve the shortcomings of the above-mentioned ultraviolet light / ozone surface cleaning and oxidation modification equipment that the process time is too long and the equipment automation is not high, the present invention aims to provide a continuous vacuum ultraviolet light / ozone surface cleaning and oxidation modification This equipment can greatly shorten the process processing time, precisely control the chemical reaction process, enhance the automation ability of the equipment, and improve the quality and efficiency of production

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