Manufacture technology of mask plate

Abstract

The invention discloses a manufacture technology of a mask plate. The technology comprises the following steps: forming an electroforming layer through an electroforming technology, and etching an etched groove with a certain depth on the electroforming layer on the side near the opening of the electroforming layer, wherein the electroforming technology comprises the steps of film pasting (1), exposing (1), developing (1), and electroforming; and the etching technology comprises the steps of film pasting (2), exposing (2), developing (2), etching, and film removing. The effective deposition opening precision of the mask plate, which is prepared by the provided technology, is easy to control, thus the opening precision can be improved, and the hole wall of the opening formed by electroforming is smooth and convenient for mould removing. The etched groove prepared by the etching technology of the opening forms a bowl shaped hole wall which is matched with the opening prepared by the electroforming, the bowl shaped hole wall has a large conical angle, so that the hole wall will not shield the vapor plating material during the vapor plating process, and thus the film forming rate of vapor plating is increased.

Description

technical field [0001] The invention relates to a manufacturing process of a mask plate for evaporation, in particular to a preparation process of a mask plate for OLED evaporation. Background technique [0002] Today, with the development of multimedia technology and the advent of the information society, the requirements for the performance of flat panel displays are getting higher and higher. In recent years, three new display technologies have emerged: plasma display, field emission display and organic electroluminescent display (OLED for short), all of which have made up for the shortcomings of cathode ray tubes and liquid crystal displays to a certain extent. Among them, organic electroluminescent displays have a series of advantages such as self-illumination, low-voltage DC drive, full curing, wide viewing angle, and rich colors. Low, its response speed can reach 1000 times that of LCD, but its manufacturing cost is lower than that of LCD with the same resolution. T...

AI Technical Summary

Problems solved by technology

Among them, double-sided etching is used to etch from both sides of the tile sheet respectively, and the formed section is a gourd-shaped opening. However, since the etching is a subtractive process and there is side corrosion, the size accuracy of the effective deposition opening on the surface of the sheet is not easy to control. There is a deviation in size, as shown in the figure, the actual etched opening size L1 is larger than the predetermined size L2, and the opening wall formed by etching is rough and not smooth

Images