Comb capacitive micro accelerometer
An accelerometer, comb capacitance technology, applied in the direction of measurement of acceleration, speed/acceleration/impact measurement, measurement device, etc., can solve the problems of small detection capacitance area, low measurement accuracy, large detection capacitance area, etc. The effect of increasing, high dimensional control accuracy, and improving measurement accuracy
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[0015] The present invention will be described in detail below in conjunction with the accompanying drawings. The description in this part is only exemplary and explanatory, and should not have any limiting effect on the protection scope of the present invention.
[0016] like figure 1 A comb-tooth capacitive micro-accelerometer shown is composed of a structural layer 1, an insulating layer 2, a substrate layer 3 and a base layer 4, and functional units are arranged on the structural layer 1 and the substrate layer 3, and the structural layer 1 and the substrate layer 4 The anchor point 5 is connected, the structural layer 1 is connected to the substrate layer 3 through the insulating layer 2 , and metal lead electrodes 6 are arranged on the substrate layer 4 and the substrate layer 3 . The material of the insulating layer 2 includes silicon dioxide.
[0017] In order to realize sensing functions such as figure 2 As shown, a fixed electrode 21, a movable electrode 22, a mas...
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