Multi-station MEMS gyro testing socket

Abstract

The invention provides a multi-station MEMS gyro testing socket which comprises an upper pressing plate and a base. The base is pressed by the upper pressing plate. The multi-station MEMS gyro testing socket is characterized in that a floating plate containing groove is formed in the base, a floating plate is arranged in the floating plate containing groove, an elastic piece is arranged at the bottom of the floating plate, a plurality of element containing grooves are formed in the floating plate, a plurality of protrusions corresponding to the element containing grooves in position are arranged on the upper pressing plate, a plurality of sets of probes are arranged on the base, the upper ends of the multiple sets of probes movably penetrate through the floating plate and are located in the element containing grooves respectively, and the lower ends of the multiple sets of probes are connected with an adapter PCB. By means of the multi-station MEMS gyro testing socket, the testing accuracy of an MEMS gyro can be effectively improved, the testing speed of the MEMS gyro can be effectively increased, and the working efficiency is improved.

Description

technical field [0001] The invention relates to a gyroscope test socket, in particular to a socket capable of testing MEMS gyroscopes at multiple stations. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) is an advanced manufacturing technology platform. It is developed on the basis of semiconductor manufacturing technology. MEMS technology uses a series of existing technologies and materials such as lithography, corrosion, and thin film in semiconductor technology. Therefore, from the perspective of manufacturing technology itself, the basic manufacturing technology in MEMS is mature. However, MEMS focuses more on ultra-precision machining, and involves many disciplines such as microelectronics, materials, mechanics, chemistry, and mechanics. Its discipline has also expanded to various branches of physics such as force, electricity, light, magnetism, sound, and surface at the microscale. [0003] Gyroscopes with variou...

AI Technical Summary

Problems solved by technology

The test sockets currently on the market use SEMI-CONTACTOR probes (POGO PIN) for testing, but due to their inherent design defects, during the multi-station testing process, it often occurs that it is difficult to take out the product, the positioning is inaccurate, and electrostatic adsorption. Even in bad situations such as short circuit, the test efficiency is not always high

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