Manufacturing method of cover plate
A manufacturing method and cover plate technology, applied in the field of MEMS sensors, can solve the problems of the impact of cover plate manufacturing process efficiency, increase the difficulty of cover plate, complicated process flow, etc., and achieve convenient and easy process control, cost saving, and simplified manufacturing process. Effect
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[0020] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. When describing the embodiments of the present invention in detail, for the convenience of illustration, the schematic diagrams are not partially enlarged according to the general scale, which should not be taken as a limitation of the present invention.
[0021] The manufacturing method of the cover plate of the present invention can be widely used in various fields, especially suitable for MEMS sensors, and will be described below through a preferred embodiment. Of course, the present invention is not limited to this specific embodiment. Common substitutions known to the skilled person are undoubtedly within the protection scope of the present invention.
[0022] figure 1 It is a flow chart of the manufacturing method of the cover pla...
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