Laser differential confocal Brillouin-Raman spectroscopy measuring method and device thereof

Abstract

The invention belongs to the field of a microimaging and spectral measurement technology and relates to a laser differential confocal Brillouin-Raman spectroscopy measuring method and a device thereof which can be used in micro-area morphological parameter comprehensive test and high-resolution imaging of a sample. According to the method and the device, a differential confocal technology is incorporated into spectrum detection. Sample position detection is performed by the differential confocal technology; spectrum detection is conducted by a spectrum detection system; and properties, such as elasticity, piezoelectricity and the like, of a material are tested by the use of brillouin scattering light abandoned by a traditional confocal Raman spectrum detection technology. Thus, micro-area high-spatial resolution morphological parameter measurement of a sample is realized. The method and the device have advantages of accurate positioning, high spatial resolution, high spectrum detection sensitivity, controllable measured focusing spot size and the like, and have a wide application prospect in fields of biomedicine, evidence obtaining in court, micro and nano-fabrication, materials engineering, engineering physics, precision metrology, physical chemistry and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-spectral imaging, combines differential confocal microscopic technology and spectral detection technology, relates to a high-resolution spectral imaging and detection method and device of "map-spectrum integration", in particular to a laser differential confocal The Jobrillouin-Raman spectroscopy measurement method and device can be used for comprehensive testing and high-resolution imaging of micro-region morphological parameters of samples. technical background [0002] In 1990, G.J.Puppels et al. reported in the journal Nature that they invented the laser confocal Raman spectroscopy microscopy technology that combined Raman spectroscopy detection technology with laser confocal microscopy technology, which was a revolutionary breakthrough in Raman technology. This technology not only inherits the high-resolution tomographic imaging characteristics of confocal microscopy, but also can perform spect...

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Problems solved by technology

[0012] The purpose of the present invention is to overcome the deficiency that the spatial resolution of the existing confocal Raman spectroscopy detection technology is difficult to improve, and at the same time use the Brillouin scattered light abandoned by the existing confocal Raman detection system to detect the mechanical properties of the material, and propose A laser differential confocal Brillouin-Raman spectroscopy measurement method and device

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