Laser multi-beam combining device and method thereof
A laser and multi-beam technology, which is applied in the direction of laser devices, semiconductor laser devices, devices for controlling laser output parameters, etc., can solve problems such as failure to meet etiology inspection requirements, poor temperature reliability, and poor beam combining accuracy, etc., to reduce errors The probability of judgment, small size, and the effect of improving polarization characteristics
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Embodiment 1
[0029] A multi-beam laser beam combining device of this embodiment, such as figure 1 As shown, a first laser 1 and a second laser 2 are included. Optionally, the first laser 1 and the second laser 2 are frequency-doubled lasers or semiconductor lasers respectively. Also includes a dichroic mirror 3, the first laser 1 is arranged on the transmission light path of the dichroic mirror 3, the second laser 2 is arranged on the reflection light path of the dichroic mirror 3, the first laser 1 and the dichroic mirror 3 is provided with a coupling mirror 4 for collimating the spot size, and a collimating mirror 5 for collimating the spot size is provided between the second laser 2 and the dichroic mirror 3 . The light emitted by the first laser 1 and the second laser 2 is respectively transmitted and reflected by the dichroic mirror 3 and recombined into an output optical path. An achromatic lens 6, an aperture stop 7, and a beam combiner 8 are arranged in sequence on the output optic...
Embodiment 2
[0035] A multi-beam laser beam combining device of this embodiment, such as figure 2As shown, a first laser 1 and a second laser 2 are included. Optionally, the first laser 1 and the second laser 2 are frequency-doubled lasers or semiconductor lasers respectively. Also includes a dichroic mirror 3, the first laser 1 is arranged on the transmission light path of the dichroic mirror 3, the second laser 2 is arranged on the reflection light path of the dichroic mirror 3, the first laser 1 and the dichroic mirror 3 is provided with a coupling mirror 4 for collimating the spot size, and a collimating mirror 5 for collimating the spot size is provided between the second laser 2 and the dichroic mirror 3 . The light emitted by the first laser 1 and the second laser 2 is respectively transmitted and reflected by the dichroic mirror 3 and recombined into an output optical path. An achromatic lens 6, an aperture stop 7, and a beam combiner 8 are arranged in sequence on the output optic...
Embodiment 3
[0041] A multi-beam laser beam combining device of this embodiment, such as image 3 As shown, a first laser 1 and three second lasers 21, 22 and 23 are included. Optionally, the first laser 1 and the second lasers 21, 22 and 23 are frequency-doubled lasers or semiconductor lasers, respectively. Also include three dichroic mirrors 31, 32 and 33 corresponding to the second lasers 21, 22 and 23, the first laser 1 is arranged on the transmission light path of the dichroic mirrors 31, 32 and 33, the second laser 21 is arranged on the reflected optical path of dichroic mirror 31, the second laser 22 is arranged on the reflected optical path of dichroic mirror 32, the second laser 23 is arranged on the reflected optical path of dichroic mirror 33, the first laser 1 and A coupling mirror 4 for collimating the spot size is provided between the dichroic mirrors 31, a collimating mirror 51 for collimating the spot size is provided between the second laser 21 and the dichroic mirror 31,...
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