Cassette elevating device and cassette transmission system with it

Abstract

The invention discloses a film magazine lifting device comprising a shell which is internally provided with a bearing chamber; a film magazine pallet which is arranged in the bearing chamber and used for bearing film magazines; a driver which is used for driving the film magazine pallet to be liftable in the bearing chamber along a vertical direction; and at least four detection sensors which are respectively arranged on the film magazine pallet and corresponding to positions at which the film magazines are required to be arranged and are used for detecting whether the film magazines are arranged at the positions at which the film magazines are required to be arranged. According to the film magazine lifting device of the embodiment of the invention, a risk of crushing caused by the fact that the film magazines are not arranged at the positions at which the film magazines are required to be arranged can be avoided. The invention also discloses a film magazine transmission system with the aforementioned film magazine lifting device.

Description

Technical field [0001] The invention relates to the field of semiconductor equipment manufacturing, in particular to a cassette lifting device and a cassette transport system with the same. Background technique [0002] In the semiconductor manufacturing process, the wafer to be processed needs to be gradually transferred from the atmospheric environment to the reaction chamber for processing, such as etching process, physical vapor deposition, etc. The wafer is transferred into the reaction chamber by a wafer transfer system, which includes a cassette loading device, a vacuum cassette lifting device, a vacuum manipulator and a transmission chamber. [0003] First, the cassette carrying device containing the cassettes is placed on the cassette loading device. The cassette loading device removes the cassette from the cassette carrying device, and then the automatic door of the vacuum cassette lifting device opens, and the cassette loading device sends the cassette to the cassette t...

AI Technical Summary

Problems solved by technology

When the cassette placement sensor is not pressed down, there are two possibilities: one is that there is indeed no cassette in the current vacuum cassette lifting device; the other is that there are cassettes in the current vacuum cassette lifting device, but the cassette Not put right

Therefore, the existing safety assurance mechanism cannot simultaneously detect whether there is a material box on the cassette tray and confirm whether the position of the material box is correct

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