Laser processing method and device for target pellet microhole based on temperature rise control

Abstract

The invention discloses a microporous laser pellet processing method and a device based on temperature rise regulation and control. Micro cutting plays an important role in micro-target structure manufacturing, but the processing efficiency is low, and contact force can be generated; therefore, micro cracks are easily caused on a pellet; in a working process, cuttings, slag and the like enter the cavity of the pellet, so that the cuttings and the slag in the pellet cannot be removed thoroughly, and the subsequent use of the pellet is affected. The method disclosed by the invention comprises the steps of perforating the pellet by ultraviolet laser, ultrashort pulse laser or femtosecond laser; adjusting the repeating frequency, the power and the pulse width of laser through a laser device power supply; monitoring the pellet processing condition in real time through a high-resolution CCD (charge coupled device); focusing laser to the surface of the pellet to be processed through a microscope; placing the pellet onto a sucking disk with a heating function, controlling a three-dimensional precision micro workbench on the sucking disk to move in three directions, X, Y and Z to realize micro adjustment on the pellet. The microporous laser pellet processing method and the device are used for processing under a condition of preventing the cuttings and the slag from entering the pellet.

Description

technical field [0001] The invention belongs to the technical field of inertial confinement laser nuclear fusion target pellet microhole processing, and in particular relates to a processing method and equipment principle for removing melting debris inside the target pellet during the process of laser machining microholes based on the control of the overall temperature rise of the target pellet, and specifically relates to The inertial confinement laser nuclear fusion target capsule laser drilling method and the heating system for controlling the temperature rise of the target capsule can obtain controllable tapered holes by applying the method and system, which can meet the requirements of the gas filling and plugging technology of the capsule. Background technique [0002] Nuclear energy can be divided into fusion energy and fission energy. Today's nuclear power plants are controlled release devices for fission energy. In order to finally solve the energy crisis of mankind,...

AI Technical Summary

Problems solved by technology

Micro-cutting can process complex micro-structures with high machining accuracy and efficiency. It plays an important role in the manufacture of micro-target structures. Its disadvantages are low processing efficiency and contact force, which can easily cause micro-cracks in the target pellets; EDM micro-machining has It has the advantages of non-contact, strong controllability, irrelevant to the hardness and strength of the material, and no cutting force. It has a strong micro-scale manufacturing capability in the processing of micro-holes and micro-grooves of conductive materials. The disadvantage is that it cannot process non-metallic materials; Laser micromachining can be used for precise machining of micro-holes, narrow slits, etc. Ultraviolet laser and femtosecond laser can be removed by photo-etching effect, without surface ablation and heat-affected zone, especially in the above-mentioned processing of non-metallic materials. It has technical advantages, but the taper of the processed hole is small, which is not conducive to the plugging process of micropores

In addition, the common disadvantage of the above processing methods is that chips, slag, etc. enter the cavity of the target pellet during the processing, and the chips and slag in the target pellet cannot be completely eliminated, which affects the subsequent use of the target pellet.

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